STATUS OF ITEP DECABORANE ION SOURCE PROGRAM.

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The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bemas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.

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KULEVOY,T.V.; PETRENKO, S.V.; KUIBEDA, R.P.; SELEZNEV, D.N.; KOZLOV, A.V.; STASEVICH, YU.B. et al. August 26, 2007.

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Description

The joint research and development program is continued to develop steady-state ion source of decaborane beam for ion implantation industry. Both Freeman and Bemas ion sources for decaborane ion beam generation were investigated. Decaborane negative ion beam as well as positive ion beam were generated and delivered to the output of mass separator. Experimental results obtained in ITEP are presented.

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  • 12TH INTERNATIONAL CONFERENCE ON ION SOURCES (ICIS 2007); JEJU, KOREA; 20070826 through 20070831

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  • Report No.: BNL--79413-2007-CP
  • Grant Number: DE-AC02-98CH10886
  • Office of Scientific & Technical Information Report Number: 918609
  • Archival Resource Key: ark:/67531/metadc879069

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Office of Scientific & Technical Information Technical Reports

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  • August 26, 2007

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

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  • Nov. 1, 2016, 5:40 p.m.

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KULEVOY,T.V.; PETRENKO, S.V.; KUIBEDA, R.P.; SELEZNEV, D.N.; KOZLOV, A.V.; STASEVICH, YU.B. et al. STATUS OF ITEP DECABORANE ION SOURCE PROGRAM., article, August 26, 2007; United States. (digital.library.unt.edu/ark:/67531/metadc879069/: accessed October 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.