Inspection strategy for LIGA microstructures using a programmable optical microscope.

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Description

The LIGA process has the ability to fabricate very precise, high aspect ratio mesoscale structures with microscale features [l]. The process consists of multiple steps before a final part is produced. Materials native to the LIGA process include metals and photoresists. These structures are routinely measured for quality control and process improvement. However, metrology of LIGA structures is challenging because of their high aspect ratio and edge topography. For the scale of LIGA structures, a programmable optical microscope is well suited for lateral (XU) critical dimension measurements. Using grayscale gradient image processing with sub-pixel interpolation, edges are detected and measurements ... continued below

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32 p.

Creation Information

Kurfess, Thomas R (Georgia Institute of Technology, Atlanta, GA); Aigeldinger, Georg & Ceremuga, Joseph T. July 1, 2004.

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Description

The LIGA process has the ability to fabricate very precise, high aspect ratio mesoscale structures with microscale features [l]. The process consists of multiple steps before a final part is produced. Materials native to the LIGA process include metals and photoresists. These structures are routinely measured for quality control and process improvement. However, metrology of LIGA structures is challenging because of their high aspect ratio and edge topography. For the scale of LIGA structures, a programmable optical microscope is well suited for lateral (XU) critical dimension measurements. Using grayscale gradient image processing with sub-pixel interpolation, edges are detected and measurements are performed. As with any measurement, understanding measurement uncertainty is necessary so that appropriate conclusions are drawn from the data. Therefore, the abilities of the inspection tool and the obstacles presented by the structures under inspection should be well understood so that precision may be quantified. This report presents an inspection method for LIGA microstructures including a comprehensive assessment of the uncertainty for each inspection scenario.

Physical Description

32 p.

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  • Report No.: SAND2004-2289
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/919157 | External Link
  • Office of Scientific & Technical Information Report Number: 919157
  • Archival Resource Key: ark:/67531/metadc877353

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • July 1, 2004

Added to The UNT Digital Library

  • Sept. 22, 2016, 2:13 a.m.

Description Last Updated

  • Nov. 29, 2016, 3:58 p.m.

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Kurfess, Thomas R (Georgia Institute of Technology, Atlanta, GA); Aigeldinger, Georg & Ceremuga, Joseph T. Inspection strategy for LIGA microstructures using a programmable optical microscope., report, July 1, 2004; United States. (digital.library.unt.edu/ark:/67531/metadc877353/: accessed May 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.