EUV Binary Phase Gratings: Fabrication and Application to Diffractive Optics

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Diffractive optics play an important role in a variety of fields such as astronomy, microscopy, and lithography. For the extreme ultraviolet (EUV) region of the spectrum they have been difficult to make due to the extremely precise control required of their surface structure. We have developed a robust fabrication technique that achieves the required topographic control through the deposition of a thin film of Si on a Cr etch stop. We have fabricated binary phase gratings using this approach that have an efficiency of 80% of the theoretical maximum. The technique is applicable to any type of binary phase optical ... continued below

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Salmassi, F.; Naulleau, P. P.; Gullikson, E. M.; Olynick, D. L. & Liddle, J. A. February 1, 2005.

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Diffractive optics play an important role in a variety of fields such as astronomy, microscopy, and lithography. For the extreme ultraviolet (EUV) region of the spectrum they have been difficult to make due to the extremely precise control required of their surface structure. We have developed a robust fabrication technique that achieves the required topographic control through the deposition of a thin film of Si on a Cr etch stop. We have fabricated binary phase gratings using this approach that have an efficiency of 80% of the theoretical maximum. The technique is applicable to any type of binary phase optical element.

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  • Journal Name: Journal of Vacuum Science and Technology; Journal Volume: 24; Journal Issue: 4; Related Information: Journal Publication Date: 07/2006

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  • Report No.: LBNL--56785-Journal
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 887185
  • Archival Resource Key: ark:/67531/metadc876196

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • February 1, 2005

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  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 1, 2017, 10:03 p.m.

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Salmassi, F.; Naulleau, P. P.; Gullikson, E. M.; Olynick, D. L. & Liddle, J. A. EUV Binary Phase Gratings: Fabrication and Application to Diffractive Optics, article, February 1, 2005; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc876196/: accessed December 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.