Ion Implantation with Scanning Probe Alignment

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Description

We describe a scanning probe instrument which integrates ion beams with the imaging and alignment function of a piezo-resistive scanning probe in high vacuum. The beam passes through several apertures and is finally collimated by a hole in the cantilever of the scanning probe. The ion beam spot size is limited by the size of the last aperture. Highly charged ions are used to show hits of single ions in resist, and we discuss the issues for implantation of single ions.

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Persaud, A.; Liddle, J.A.; Schenkel, T.; Bokor, J.; Ivanov, Tzv. & Rangelow, I.W. July 12, 2005.

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Description

We describe a scanning probe instrument which integrates ion beams with the imaging and alignment function of a piezo-resistive scanning probe in high vacuum. The beam passes through several apertures and is finally collimated by a hole in the cantilever of the scanning probe. The ion beam spot size is limited by the size of the last aperture. Highly charged ions are used to show hits of single ions in resist, and we discuss the issues for implantation of single ions.

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  • 49th International Conference on Electron, Ion,and Photon Beam Technology and Nanofrabrication (EIPBN2005), Orlando, FL,May 31-June 3, 2005

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  • Report No.: LBNL--58750
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 881844
  • Archival Resource Key: ark:/67531/metadc876043

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  • July 12, 2005

Added to The UNT Digital Library

  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 9, 2016, 10:17 p.m.

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Persaud, A.; Liddle, J.A.; Schenkel, T.; Bokor, J.; Ivanov, Tzv. & Rangelow, I.W. Ion Implantation with Scanning Probe Alignment, article, July 12, 2005; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc876043/: accessed September 26, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.