High temperature stability multilayers for EUV condenser optics

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Description

We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that upon annealing a thermally-induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete the multilayer is stable at temperatures up to 400 C.

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Bajt, S & Stearns, D G May 3, 2005.

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Description

We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that upon annealing a thermally-induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete the multilayer is stable at temperatures up to 400 C.

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PDF-file: 33 pages; size: 0.9 Mbytes

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  • Journal Name: Applied Optics; Journal Volume: 44; Journal Issue: 36

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  • Report No.: UCRL-JRNL-212020
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 878205
  • Archival Resource Key: ark:/67531/metadc875752

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • May 3, 2005

Added to The UNT Digital Library

  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 7, 2016, 3:20 p.m.

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Bajt, S & Stearns, D G. High temperature stability multilayers for EUV condenser optics, article, May 3, 2005; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc875752/: accessed October 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.