Calculations of Optimal Source Geometry and Controlled Combinatorial Gradients in Fixed- and Rotating-Substrate PVD Systems

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Normalized forms of conventional flux-distribution formulas are applied to physical-vapor deposition from open-boat type sources onto static and rotating substrates. For the rotating-substrate case, the deposition geometry that yields optimal film-thickness uniformity for different source-substrate separations is derived empirically. In addition, flux-distribution formulas are used to develop a novel method for combinatorial physical-vapor deposition. With this method, a single deposition system may be used, without modification, to deposit either highly uniform or graded-composition thin-film materials.

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5 p.

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Teeter, G. November 1, 2005.

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Normalized forms of conventional flux-distribution formulas are applied to physical-vapor deposition from open-boat type sources onto static and rotating substrates. For the rotating-substrate case, the deposition geometry that yields optimal film-thickness uniformity for different source-substrate separations is derived empirically. In addition, flux-distribution formulas are used to develop a novel method for combinatorial physical-vapor deposition. With this method, a single deposition system may be used, without modification, to deposit either highly uniform or graded-composition thin-film materials.

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5 p.

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  • Related Information: Presented at the 2005 DOE Solar Energy Technologies Program Review Meeting held November 7-10, 2005 in Denver, Colorado. Also included in the proceedings available on CD-ROM (DOE/GO-1020060-2245; NREL/CD-520-38577)

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  • Report No.: NREL/CP-520-38950
  • Grant Number: AC36-99-GO10337
  • Office of Scientific & Technical Information Report Number: 882600
  • Archival Resource Key: ark:/67531/metadc875612

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  • November 1, 2005

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  • Sept. 21, 2016, 2:29 a.m.

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  • April 6, 2017, 12:35 p.m.

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Teeter, G. Calculations of Optimal Source Geometry and Controlled Combinatorial Gradients in Fixed- and Rotating-Substrate PVD Systems, article, November 1, 2005; Golden, Colorado. (digital.library.unt.edu/ark:/67531/metadc875612/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.