Cathodic arcs

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Cathodic arc plasma deposition has become the technology of choice for hard, wear and corrosion resistant coatings for a variety of applications. The history, basic physics of cathodic arc operation, the infamous macroparticle problem and common filter solutions, and emerging high-tech applications are briefly reviewed. Cathodic arc plasmas standout due to their high degree of ionization, with important consequences for film nucleation, growth, and efficient utilization of substrate bias. Industrial processes often use cathodic arc plasma in reactive mode. In contrast, the science of arcs has focused on the case of vacuum arcs. Future research directions include closing the knowledge ... continued below

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Anders, Andre October 29, 2003.

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Description

Cathodic arc plasma deposition has become the technology of choice for hard, wear and corrosion resistant coatings for a variety of applications. The history, basic physics of cathodic arc operation, the infamous macroparticle problem and common filter solutions, and emerging high-tech applications are briefly reviewed. Cathodic arc plasmas standout due to their high degree of ionization, with important consequences for film nucleation, growth, and efficient utilization of substrate bias. Industrial processes often use cathodic arc plasma in reactive mode. In contrast, the science of arcs has focused on the case of vacuum arcs. Future research directions include closing the knowledge gap for reactive mode, large area coating, linear sources and filters, metal plasma immersion process, with application in high-tech and biomedical fields.

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  • International Joint Workshop of the Belgian andFrench Vacuum Society 'Nouvelles Tendances en Procedes Magnetron et Arcpour le Depot de Couches Minces', Gent, Belgium, November 24-25,2003

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  • Report No.: LBNL--53979
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 882063
  • Archival Resource Key: ark:/67531/metadc873432

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Office of Scientific & Technical Information Technical Reports

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Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • October 29, 2003

Added to The UNT Digital Library

  • Sept. 21, 2016, 2:29 a.m.

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  • Sept. 29, 2016, 7:43 p.m.

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Anders, Andre. Cathodic arcs, article, October 29, 2003; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc873432/: accessed November 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.