Field Emitter Arrays and Displays Produced by Ion Tracking Lithography

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When ions of sufficient electronic energy loss traverse a dielectric film or foil, they alter the chemical bonding along their nominally straight path within the material. A suitable etchant can quickly dissolve these so-called latent tracks leaving holes of small diameter ({approx}10nm) but long length - several microns. Continuing the etching process gradually increases the diameter reproducibly and uniformly. The trackable medium can be applied as a uniform film onto large substrates. The small, monodisperse holes produced by this track etching can be used in conjunction with additional thin film processing to create functional structures attached to the substrate. For ... continued below

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Felter, T E; Musket, R G & Bernhardt, A F December 28, 2004.

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Description

When ions of sufficient electronic energy loss traverse a dielectric film or foil, they alter the chemical bonding along their nominally straight path within the material. A suitable etchant can quickly dissolve these so-called latent tracks leaving holes of small diameter ({approx}10nm) but long length - several microns. Continuing the etching process gradually increases the diameter reproducibly and uniformly. The trackable medium can be applied as a uniform film onto large substrates. The small, monodisperse holes produced by this track etching can be used in conjunction with additional thin film processing to create functional structures attached to the substrate. For example, Lawrence Livermore National Laboratory and Candescent Technologies Corporation (CTC) co-developed a process to make arrays of gated field emitters ({approx}100nm diameter electron guns) for CTC's ThinCRT{trademark} displays, which have been fabricated to diagonal dimensions > 13. Additional technological applications of ion tracking lithography will be briefly covered.

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PDF-file: 9 pages; size: 0.9 Mbytes

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  • Journal Name: Nuclear Instruments and Methods B; Journal Volume: 241

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  • Report No.: UCRL-JRNL-208798
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 875956
  • Archival Resource Key: ark:/67531/metadc873267

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  • December 28, 2004

Added to The UNT Digital Library

  • Sept. 21, 2016, 2:29 a.m.

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  • Dec. 5, 2016, 4 p.m.

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Felter, T E; Musket, R G & Bernhardt, A F. Field Emitter Arrays and Displays Produced by Ion Tracking Lithography, article, December 28, 2004; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc873267/: accessed August 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.