The Effect of Heat Treatments and Coatings on the Outgassing Rate of Stainless Steel Chambers Page: 1 of 32
This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided to UNT Digital Library by the UNT Libraries Government Documents Department.
Extracted Text
The following text was automatically extracted from the image on this page using optical character recognition software:
Effect of heat treatments and coatings on the
outgassing rate of stainless steel chambers
Md Abdullah A. Mamun and Abdelmageed A. Elmustafa
Dept. of Mechanical and Aerospace Engineering, Old Dominion University, Norfolk, Virginia 23529
Marcy L. Stutzmana), Philip A. Adderley, and Matthew Poelker
Thomas Jefferson National Accelerator Facility, Newport News, Virginia 23606
a) Electronic mail: marcy@jlab.org
ABSTRACT
The outgassing rates of three nominally identical 304L stainless steel vacuum chambers
were measured to determine the effect of chamber coatings and heat treatments. One
chamber was coated with titanium nitride (TiN) and one with amorphous silicon (a-Si)
immediately following fabrication. The last chamber was first tested without any coating,
and then coated with a-Si following a series of heat treatments. The outgassing rate of
each chamber was measured at room temperatures between 15 and 30 C following bakes
at temperatures between 90 and 400 C. Measurements for bare steel showed a significant
reduction in the outgassing rate by nearly a factor of 20 after a 400 C heat treatment
(3.5x10-12 Torr L s- cm- prior to heat treatment, reduced to 1.7x10-i Torr L s- cm-
following heat treatment). The chambers that were coated with a-Si showed minimal
change in outgassing rates with heat treatment, though an outgassing rate reduced by heat
treatments prior to a-Si coating was successfully preserved throughout a series of bakes.
The TiN coated chamber exhibited remarkably low outgassing rates, up to four orders of
magnitude lower than the uncoated stainless steel, but the uncertainty in these rates is1
Upcoming Pages
Here’s what’s next.
Search Inside
This article can be searched. Note: Results may vary based on the legibility of text within the document.
Tools / Downloads
Get a copy of this page or view the extracted text.
Citing and Sharing
Basic information for referencing this web page. We also provide extended guidance on usage rights, references, copying or embedding.
Reference the current page of this Article.
Mamum, Md Abdullah A.; Elmustafa, Abdelmageed A,; Stutzman, Marcy L.; Adderley, Philip A. & Poelker, Matthew. The Effect of Heat Treatments and Coatings on the Outgassing Rate of Stainless Steel Chambers, article, March 1, 2014; Newport News, Virginia. (https://digital.library.unt.edu/ark:/67531/metadc865985/m1/1/: accessed April 23, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.