Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region

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Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.

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Soufli, R; Fernandez-Perea, M & Al, E T November 8, 2011.

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Corrosion has prevented use of SiC/Mg multilayers in applications requiring good lifetime stability. We have developed Al-based barrier layers that dramatically reduce corrosion, while preserving high reflectance and low stress. The aforementioned advances may enable the implementation of corrosion-resistant, high-performance SiC/Mg coatings in the 28-75 nm region in applications such as tabletop EUV/soft x-ray laser sources and solar physics telescopes. Further study and optimization of corrosion barrier structures and coating designs is underway.

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PDF-file: 20 pages; size: 3.8 Mbytes

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  • Presented at: 2011 International Workshop on EUV and Soft X-Ray Soirces, Dublin, Ireland, Nov 07 - Nov 09, 2011

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  • Report No.: LLNL-PROC-512881
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 1035593
  • Archival Resource Key: ark:/67531/metadc846882

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  • November 8, 2011

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  • May 19, 2016, 3:16 p.m.

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  • Dec. 5, 2016, 1:18 p.m.

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Soufli, R; Fernandez-Perea, M & Al, E T. Corrosion-resistant multilayer coatings for the 28-75 nm wavelength region, article, November 8, 2011; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc846882/: accessed October 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.