In situ optimization of co-implantation and substrate temperature conditions for Nv-center formation in single crystal diamonds

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We present first results from in situ characterization of NV-formation in single crystal diamonds following implantation of low energy nitrogen ions (7.7 keV), co-implantation of hydrogen, helium and carbon ions and in situ annealing. Diamond samples were implanted at room temperature or at a temperature of 780{degree} C during the implantation steps. We find that dynamic annealing during co-implantation enhances NV-center formation by up to 25%.

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035022

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Schwartz, Julian; Michaelides, Philip; Weis, Christoph D. & Schenkel, Thomas February 1, 2011.

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We present first results from in situ characterization of NV-formation in single crystal diamonds following implantation of low energy nitrogen ions (7.7 keV), co-implantation of hydrogen, helium and carbon ions and in situ annealing. Diamond samples were implanted at room temperature or at a temperature of 780{degree} C during the implantation steps. We find that dynamic annealing during co-implantation enhances NV-center formation by up to 25%.

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035022

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  • Journal Name: New Journal of Physics, NJP; Journal Volume: 13; Journal Issue: 3

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  • Report No.: LBNL-5229E
  • Grant Number: DE-AC02-05CH11231
  • DOI: 10.1088/1367-2630/13/3/035022 | External Link
  • Office of Scientific & Technical Information Report Number: 1052170
  • Archival Resource Key: ark:/67531/metadc846143

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Office of Scientific & Technical Information Technical Reports

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  • February 1, 2011

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  • May 19, 2016, 9:45 a.m.

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  • Oct. 4, 2017, 3:29 p.m.

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Schwartz, Julian; Michaelides, Philip; Weis, Christoph D. & Schenkel, Thomas. In situ optimization of co-implantation and substrate temperature conditions for Nv-center formation in single crystal diamonds, article, February 1, 2011; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc846143/: accessed November 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.