Design, simulation, fabrication, and preliminary tests of 3D CMS pixel detectors for the super-LHC

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The Super-LHC upgrade puts strong demands on the radiation hardness of the innermost tracking detectors of the CMS, which cannot be fulfilled with any conventional planar detector design. The so-called 3D detector architectures, which feature columnar electrodes passing through the substrate thickness, are under investigation as a potential solution for the closest operation points to the beams, where the radiation fluence is estimated to reach 10{sup 16} n{sub eq}/cm{sup 2}. Two different 3D detector designs with CMS pixel readout electronics are being developed and evaluated for their advantages and drawbacks. The fabrication of full-3D active edge CMS pixel devices with ... continued below

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9 pages

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Koybasi, Ozhan; U., /Purdue; Bortoletto, Daniela; U., /Purdue; Hansen, Thor-Erik; /SINTEF, Oslo et al. January 1, 2010.

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The Super-LHC upgrade puts strong demands on the radiation hardness of the innermost tracking detectors of the CMS, which cannot be fulfilled with any conventional planar detector design. The so-called 3D detector architectures, which feature columnar electrodes passing through the substrate thickness, are under investigation as a potential solution for the closest operation points to the beams, where the radiation fluence is estimated to reach 10{sup 16} n{sub eq}/cm{sup 2}. Two different 3D detector designs with CMS pixel readout electronics are being developed and evaluated for their advantages and drawbacks. The fabrication of full-3D active edge CMS pixel devices with p-type substrate has been successfully completed at SINTEF. In this paper, we study the expected post-irradiation behaviors of these devices with simulations and, after a brief description of their fabrication, we report the first leakage current measurement results as performed on wafer.

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9 pages

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  • Journal Name: IEEE Trans.Nucl.Sci.57:2897-2905,2010; Journal Volume: 57; Journal Issue: 5

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  • Report No.: FERMILAB-PUB-10-558-CD
  • Grant Number: AC02-07CH11359
  • DOI: 10.1109/TNS.2010.2053720 | External Link
  • Office of Scientific & Technical Information Report Number: 1005356
  • Archival Resource Key: ark:/67531/metadc845592

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • January 1, 2010

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  • May 19, 2016, 3:16 p.m.

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  • Aug. 26, 2016, 4:18 p.m.

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Koybasi, Ozhan; U., /Purdue; Bortoletto, Daniela; U., /Purdue; Hansen, Thor-Erik; /SINTEF, Oslo et al. Design, simulation, fabrication, and preliminary tests of 3D CMS pixel detectors for the super-LHC, article, January 1, 2010; Batavia, Illinois. (digital.library.unt.edu/ark:/67531/metadc845592/: accessed December 13, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.