Fundamentals of embossing nanoimprint lithography in polymer substrates.

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Description

The convergence of micro-/nano-electromechanical systems (MEMS/NEMS) and biomedical industries is creating a need for innovation and discovery around materials, particularly in miniaturized systems that use polymers as the primary substrate. Polymers are ubiquitous in the microelectronics industry and are used as sensing materials, lithography tools, replication molds, microfluidics, nanofluidics, and biomedical devices. This diverse set of operational requirements dictates that the materials employed must possess different properties in order to reduce the cost of production, decrease the scale of devices to the appropriate degree, and generate engineered devices with new functional properties at cost-competitive levels of production. Nanoscale control of ... continued below

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9 p.

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Simmons, Blake Alexander & King, William P. (University of Illinois, Urbana IL) February 1, 2011.

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Description

The convergence of micro-/nano-electromechanical systems (MEMS/NEMS) and biomedical industries is creating a need for innovation and discovery around materials, particularly in miniaturized systems that use polymers as the primary substrate. Polymers are ubiquitous in the microelectronics industry and are used as sensing materials, lithography tools, replication molds, microfluidics, nanofluidics, and biomedical devices. This diverse set of operational requirements dictates that the materials employed must possess different properties in order to reduce the cost of production, decrease the scale of devices to the appropriate degree, and generate engineered devices with new functional properties at cost-competitive levels of production. Nanoscale control of polymer deformation at a massive scale would enable breakthroughs in all of the aforementioned applications, but is currently beyond the current capabilities of mass manufacturing. This project was focused on developing a fundamental understanding of how polymers behave under different loads and environments at the nanoscale in terms of performance and fidelity in order to fill the most critical gaps in our current knowledgebase on this topic.

Physical Description

9 p.

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  • Report No.: SAND2011-0676
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/1011211 | External Link
  • Office of Scientific & Technical Information Report Number: 1011211
  • Archival Resource Key: ark:/67531/metadc843508

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  • February 1, 2011

Added to The UNT Digital Library

  • May 19, 2016, 3:16 p.m.

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  • Nov. 28, 2016, 6:13 p.m.

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Simmons, Blake Alexander & King, William P. (University of Illinois, Urbana IL). Fundamentals of embossing nanoimprint lithography in polymer substrates., report, February 1, 2011; United States. (digital.library.unt.edu/ark:/67531/metadc843508/: accessed August 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.