Fabrication and characterization of submicron polymer waveguides by micro-transfer molding Page: 4 of 54

                                
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TABLE OF FIGURES
Figure 1 Schematic diagram of a quantum dot on the waveguide structure................ 4
Figure 2 Fabricated waveguides array with coupled light sources. (a) SEM
micrographs of the waveguides and (b) optical micrograph of the coupled light sources
are shown with (c) a schematic illustration of guided light......................................... 4
Figure 3 SEM images of (a) top and (b) diagonal views of grating coupler. (c) Laser
shined on the coupler region and guided by the waveguide...................................... 5
Figure 4 Illustration of the theory of diffraction for a planar wavefront ................... 8
Figure 5 Two polymer microtransfer molding fabrication process .......................... 11
Figure  6  Experim ental setup  for 2P-p TM   ................................................................ 12
Figure 7 Schematic diagram of the coupler waveguide structure.............................. 14
Figure 8 Conceptual representation of the function of the waveguide structure.......... 15
Figure 9 Schematic diagram of the experimental setup for characterizing the
waveguide..................................................................................................................... 17
Figure 10 Schematic diagram showing the placement of the focused light spot on the
coupler  w aveguide  .................................................................................................. .  18
Figure 11 SEM image of the 2.5pm period waveguide structure............... 19
Figure 12 SEM image of the edge of the light coupler................................................. 20
Figure 13 Cross section and dimensions of the waveguides ................................... 20
Figure 14 Experimental setup to observe the diffraction pattern with a normal incident
laser beam .................................................................................................................... 21
Figure 15 (a) The diffraction pattern from the coupler is imposed on the paper screen.
(b) The distance from the incident beam to the 1st order diffraction is measured....... 23
Figure 16 Measured distances to calculate diffraction angle.................................... 24
Figure 17 Optical image of the guided 1st order diffraction at the end of the waveguide.
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Figure 18 The calculated incident angles for multi-order diffraction in the visible range.
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