Etching of Niobium Sample Placed on Superconducting Radio Frequency Cavity Surface in Ar/CL2 Plasma Metadata

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Title

  • Main Title Etching of Niobium Sample Placed on Superconducting Radio Frequency Cavity Surface in Ar/CL2 Plasma

Creator

  • Author: Janardan Upadhyay, Larry Phillips, Anne-Marie Valente
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy. Office of Science.
    Contributor Type: Organization
    Contributor Info: USDOE Office of Science (SC)

Publisher

  • Name: Thomas Jefferson National Accelerator Facility (U.S.)
    Place of Publication: Newport News, Virginia
    Additional Info: Thomas Jefferson National Accelerator Facility, Newport News, VA (United States)

Date

  • Creation: 2011-09-01

Language

  • English

Description

  • Content Description: Plasma based surface modification is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. It has been proven with flat samples that the bulk Niobium (Nb) removal rate and the surface roughness after the plasma etchings are equal to or better than wet etching processes. To optimize the plasma parameters, we are using a single cell cavity with 20 sample holders symmetrically distributed over the cell. These holders serve the purpose of diagnostic ports for the measurement of the plasma parameters and for the holding of the Nb sample to be etched. The plasma properties at RF (100 MHz) and MW (2.45 GHz) frequencies are being measured with the help of electrical and optical probes at different pressures and RF power levels inside of this cavity. The niobium coupons placed on several holders around the cell are being etched simultaneously. The etching results will be presented at this conference.

Subject

  • Keyword: Removal
  • Keyword: Modifications
  • STI Subject Categories: 70 Plasma Physics And Fusion Technology
  • Keyword: Rf Systems
  • Keyword: Etching
  • Keyword: Roughness
  • Keyword: Superconducting Cavity Resonators
  • Keyword: Sample Holders
  • Keyword: Surface Properties
  • Keyword: Plasma
  • Keyword: Niobium

Source

  • Conference: IPAC2011, 4-9 Sep 2011, San Sebastian, Spain

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Report No.: JLAB-ACC-11-1434
  • Report No.: DOE/OR/23177-1923
  • Grant Number: AC05-06OR23177
  • Office of Scientific & Technical Information Report Number: 1029462
  • Archival Resource Key: ark:/67531/metadc838028
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