Etching of Niobium Sample Placed on Superconducting Radio Frequency Cavity Surface in Ar/CL2 Plasma

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Plasma based surface modification is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. It has been proven with flat samples that the bulk Niobium (Nb) removal rate and the surface roughness after the plasma etchings are equal to or better than wet etching processes. To optimize the plasma parameters, we are using a single cell cavity with 20 sample holders symmetrically distributed over the cell. These holders serve the purpose of diagnostic ports for the measurement of the plasma parameters and for the holding of the Nb sample to be etched. The plasma properties at RF ... continued below

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Janardan Upadhyay, Larry Phillips, Anne-Marie Valente September 1, 2011.

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Plasma based surface modification is a promising alternative to wet etching of superconducting radio frequency (SRF) cavities. It has been proven with flat samples that the bulk Niobium (Nb) removal rate and the surface roughness after the plasma etchings are equal to or better than wet etching processes. To optimize the plasma parameters, we are using a single cell cavity with 20 sample holders symmetrically distributed over the cell. These holders serve the purpose of diagnostic ports for the measurement of the plasma parameters and for the holding of the Nb sample to be etched. The plasma properties at RF (100 MHz) and MW (2.45 GHz) frequencies are being measured with the help of electrical and optical probes at different pressures and RF power levels inside of this cavity. The niobium coupons placed on several holders around the cell are being etched simultaneously. The etching results will be presented at this conference.

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  • IPAC2011, 4-9 Sep 2011, San Sebastian, Spain

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  • Report No.: JLAB-ACC-11-1434
  • Report No.: DOE/OR/23177-1923
  • Grant Number: AC05-06OR23177
  • Office of Scientific & Technical Information Report Number: 1029462
  • Archival Resource Key: ark:/67531/metadc838028

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  • September 1, 2011

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  • May 19, 2016, 3:16 p.m.

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  • Aug. 3, 2016, 3:16 p.m.

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Janardan Upadhyay, Larry Phillips, Anne-Marie Valente. Etching of Niobium Sample Placed on Superconducting Radio Frequency Cavity Surface in Ar/CL2 Plasma, article, September 1, 2011; Newport News, Virginia. (digital.library.unt.edu/ark:/67531/metadc838028/: accessed September 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.