Thermal-stress modeling of an optical microphone at high temperature.

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Description

To help determine the capability range of a MEMS optical microphone design in harsh conditions computer simulations were carried out. Thermal stress modeling was performed up to temperatures of 1000 C. Particular concern was over stress and strain profiles due to the coefficient of thermal expansion mismatch between the polysilicon device and alumina packaging. Preliminary results with simplified models indicate acceptable levels of deformation within the device.

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26 p.

Creation Information

Barnard, Casey Anderson August 1, 2010.

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Description

To help determine the capability range of a MEMS optical microphone design in harsh conditions computer simulations were carried out. Thermal stress modeling was performed up to temperatures of 1000 C. Particular concern was over stress and strain profiles due to the coefficient of thermal expansion mismatch between the polysilicon device and alumina packaging. Preliminary results with simplified models indicate acceptable levels of deformation within the device.

Physical Description

26 p.

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  • Report No.: SAND2010-5939
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/1005061 | External Link
  • Office of Scientific & Technical Information Report Number: 1005061
  • Archival Resource Key: ark:/67531/metadc834562

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • August 1, 2010

Added to The UNT Digital Library

  • May 19, 2016, 3:16 p.m.

Description Last Updated

  • Dec. 2, 2016, 3:32 p.m.

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Barnard, Casey Anderson. Thermal-stress modeling of an optical microphone at high temperature., report, August 1, 2010; United States. (digital.library.unt.edu/ark:/67531/metadc834562/: accessed November 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.