LER control and mitigation: mask roughness induced LER

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In the push towards commercialization of extreme-ultraviolet lithography (EUVL), meeting the stringent requirements for line-edge roughness (LER) is increasingly challenging. For the 22-nm half-pitch node and below, the ITRS requires under 1.2 nm LER. Much of this LER is thought to arise from three significant contributors: LER on the mask absorber pattern, LER from the resist, and LER from mask roughness induced speckle. The physical mechanism behind the last contributor is becoming clearer, but how it is affected by the presence of aberrations is less well understood. Here, we conduct a full 2D aerial image simulation analysis of aberrations sensitivities ... continued below

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McClinton, Brittany & Naulleau, Patrick February 21, 2011.

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In the push towards commercialization of extreme-ultraviolet lithography (EUVL), meeting the stringent requirements for line-edge roughness (LER) is increasingly challenging. For the 22-nm half-pitch node and below, the ITRS requires under 1.2 nm LER. Much of this LER is thought to arise from three significant contributors: LER on the mask absorber pattern, LER from the resist, and LER from mask roughness induced speckle. The physical mechanism behind the last contributor is becoming clearer, but how it is affected by the presence of aberrations is less well understood. Here, we conduct a full 2D aerial image simulation analysis of aberrations sensitivities of mask roughness induced LER for the first 37 fringe zernikes. These results serve as a guideline for future LER aberrations control. In examining how to mitigate mask roughness induced LER, we next consider an alternate illumination scheme whereby a traditional dipole's angular spectrum is extended in the direction parallel to the line-and-space mask absorber pattern to represent a 'strip'. While this illumination surprisingly provides merely minimal improvement to the LER as several alternate illumination schemes, overall imaging quality in terms of ILS, NILS, and contrast is improved. While the 22-nm half-pitch node can tolerate significant aberrations from a mask roughness induced LER perspective, total aberration levels for the 16-nm half-pitch node need to be strictly capped at 0.25nm rms to meet the ITRS guidelines. An individual aberrations study for the first 37 fringe zernikes on the 16-nm half-pitch node at the 0.25nm rms level reveals a sensitivity to various forms of spherical aberrations (Z9 & Z25) and quadrafoil (Z28) in particular, under conventional crosspole illumination ({sigma} = 0.10). Compared to conventional dipole or crosspole illuminations, an extended dipole 'strip' illumination scheme offers a way to mitigate mask roughness induced LER, while still maintaining high imaging quality for critical mask levels at the 16-nm half-pitch node.

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  • SPIE Advanced Lithography, San Jose, CA, February 27 - March 3, 2011

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  • Report No.: LBNL-4562E-Poster
  • Grant Number: DE-AC02-05CH11231
  • Office of Scientific & Technical Information Report Number: 1016362
  • Archival Resource Key: ark:/67531/metadc833612

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  • February 21, 2011

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  • May 19, 2016, 3:16 p.m.

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  • Oct. 2, 2017, 5:06 p.m.

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McClinton, Brittany & Naulleau, Patrick. LER control and mitigation: mask roughness induced LER, article, February 21, 2011; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc833612/: accessed June 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.