Packaging a liquid metal ESD with micro-scale mercury droplet.

PDF Version Also Available for Download.

Description

Micro-Gas-Analyzers have many applications in detecting chemical compounds present in the air. MEMS valves are used to perform sampling of gasses, as they enable control of fluid flow at the micro level. Current generation electrostatically actuated MEMS valves were tested to determine their ability to hold off a given gauge pressure with an applied voltage. Current valve designs were able to hold off 98 psi with only 82 V applied to the valves. The valves were determined to be 1.83 times more efficient than older valve designs, due to increasing the electrostatic area of the valve and trapping oxide between ... continued below

Physical Description

40 p.

Creation Information

Creator: Unknown. January 1, 2012.

Context

This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

Who

People and organizations associated with either the creation of this report or its content.

Creator

  • We've been unable to identify the creator(s) of this report.

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this report. Follow the links below to find similar items on the Digital Library.

Description

Micro-Gas-Analyzers have many applications in detecting chemical compounds present in the air. MEMS valves are used to perform sampling of gasses, as they enable control of fluid flow at the micro level. Current generation electrostatically actuated MEMS valves were tested to determine their ability to hold off a given gauge pressure with an applied voltage. Current valve designs were able to hold off 98 psi with only 82 V applied to the valves. The valves were determined to be 1.83 times more efficient than older valve designs, due to increasing the electrostatic area of the valve and trapping oxide between polysilicon layers. Newer valve designs were also proposed and modeled using ANSYS multiphysics, which should be able to hold off 100 psi with only 29 V needed. This performance would be 2.82 times more efficient than current designs, or 5.17 times more efficient than older valve designs. This will be accomplished by further increasing the valve radius and decreasing the gap between the valve boss and electrode.

Physical Description

40 p.

Language

Item Type

Identifier

Unique identifying numbers for this report in the Digital Library or other systems.

  • Report No.: SAND2012-0124
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/1035997 | External Link
  • Office of Scientific & Technical Information Report Number: 1035997
  • Archival Resource Key: ark:/67531/metadc830232

Collections

This report is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this report?

When

Dates and time periods associated with this report.

Creation Date

  • January 1, 2012

Added to The UNT Digital Library

  • May 19, 2016, 3:16 p.m.

Description Last Updated

  • Nov. 30, 2016, 3:16 p.m.

Usage Statistics

When was this report last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 3

Interact With This Report

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Packaging a liquid metal ESD with micro-scale mercury droplet., report, January 1, 2012; United States. (digital.library.unt.edu/ark:/67531/metadc830232/: accessed September 25, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.