Optimization of an Analytical Electron Microscope for X-Ray Microanalysis: Instrumental Problems

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The addition of an energy dispersive x-ray spectrometer to a modern transmission or scanning transmission electron microscope can provide a powerful tool in the characterization of materials. Unfortunately this seemingly simple modification can lead to a host of instrumental problems with respect to the accuracy, validity, and quality of the recorded information. This tutorial reviews the complications which can arise in performing· x-ray microanalysis in current analytical electron microscopes. The first topic treated in depth is fluorescence by uncollimated radiation. The source, distinguishing characteristics, effects on quantitative analysis and schemes for elimination. or minimization as applicable to TEM/STEMs, D-STEMs and ... continued below

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Bentley, J; Zaluzec, N J; Kenik, E A & Carpenter, R W April 1, 1979.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Oak Ridge National Laboratory
    Publisher Info: ORNL (Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States))
    Place of Publication: Oak Ridge, Tennessee

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Description

The addition of an energy dispersive x-ray spectrometer to a modern transmission or scanning transmission electron microscope can provide a powerful tool in the characterization of materials. Unfortunately this seemingly simple modification can lead to a host of instrumental problems with respect to the accuracy, validity, and quality of the recorded information. This tutorial reviews the complications which can arise in performing· x-ray microanalysis in current analytical electron microscopes. The first topic treated in depth is fluorescence by uncollimated radiation. The source, distinguishing characteristics, effects on quantitative analysis and schemes for elimination. or minimization as applicable to TEM/STEMs, D-STEMs and HVEMs are discussed. The local specimen environment is considered in the second major section where again detrimental effects on quantitative analysis and remedial procedures, particularly the use of "low-background" specimen holders, are highlighted. Finally, the detrimental aspects of specimen contamination, insofar as they affect x-ray microanalysis, are discussed. It is concluded that if the described preventive measures are implemented, reliable quantitative analysis is possible.

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  • SEM/79, Washington, DC, April 16 - 20, 1979

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  • Report No.: CONF-790418-6
  • Grant Number: W-7405-ENG-26
  • Office of Scientific & Technical Information Report Number: 1091511
  • Archival Resource Key: ark:/67531/metadc828050

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  • April 1, 1979

Added to The UNT Digital Library

  • May 19, 2016, 9:45 a.m.

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  • Nov. 30, 2016, 2:52 p.m.

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Bentley, J; Zaluzec, N J; Kenik, E A & Carpenter, R W. Optimization of an Analytical Electron Microscope for X-Ray Microanalysis: Instrumental Problems, article, April 1, 1979; Oak Ridge, Tennessee. (digital.library.unt.edu/ark:/67531/metadc828050/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.