Development of Characterization Tools for Reliability Testing of MicroElectroMechanical System Actuators

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Description

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

Physical Description

9 p.

Creation Information

Allen, James J.; Eaton, William P.; Smith, Norman F. & Tanner, Danelle M. July 26, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

Physical Description

9 p.

Notes

OSTI as DE00009671

Medium: P; Size: 9 pages

Source

  • Symposium on Micromachining and Microfabrication, Santa Clara, CA (US), 09/20/1999--09/22/1999

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  • Report No.: SAND99-1944C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 9671
  • Archival Resource Key: ark:/67531/metadc794844

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • July 26, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

Description Last Updated

  • April 11, 2017, 7:34 p.m.

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Allen, James J.; Eaton, William P.; Smith, Norman F. & Tanner, Danelle M. Development of Characterization Tools for Reliability Testing of MicroElectroMechanical System Actuators, article, July 26, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc794844/: accessed July 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.