A comparative study of residual stresses and microstructure in a-tC films

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We compare the microstructure of highly tetrahedrally-coordinated-amorphous carbon (a-tC) films prepared by pulsed laser deposition (PLD), measured using both small angle x-ray scattering (SAXS) and x-ray reflectivity, with other physical properties such as film stress and electrical resistivity. These properties are controlled by the film growth conditions and film thicknesses. Films prepared under vacuum conditions exhibit a shift in the measured mass density, as a function of laser energy density. The density for films approximately 600{angstrom} thick approach that of crystalline diamond. The measured densities for thicker, approximately 1000{angstrom} films, exhibit a smaller shift, and a lower density value. This ... continued below

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7 p.

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Martinez-Miranda, L.J.; Sullivan, J.P. & Friedmann, T.A. July 1, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We compare the microstructure of highly tetrahedrally-coordinated-amorphous carbon (a-tC) films prepared by pulsed laser deposition (PLD), measured using both small angle x-ray scattering (SAXS) and x-ray reflectivity, with other physical properties such as film stress and electrical resistivity. These properties are controlled by the film growth conditions and film thicknesses. Films prepared under vacuum conditions exhibit a shift in the measured mass density, as a function of laser energy density. The density for films approximately 600{angstrom} thick approach that of crystalline diamond. The measured densities for thicker, approximately 1000{angstrom} films, exhibit a smaller shift, and a lower density value. This shift correlates to observed changes in film stress and electrical resistivity. The small angle signal of the reflectivity spectra suggests the presence of layering, or in-plane density variations or a combination of both within the films.

Physical Description

7 p.

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OSTI as DE95014841

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE95014841
  • Report No.: SAND--94-2864C
  • Report No.: CONF-950412--27
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 90724
  • Archival Resource Key: ark:/67531/metadc794419

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Office of Scientific & Technical Information Technical Reports

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Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 1, 1995

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  • Dec. 19, 2015, 7:14 p.m.

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  • Aug. 23, 2016, 2:58 p.m.

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Martinez-Miranda, L.J.; Sullivan, J.P. & Friedmann, T.A. A comparative study of residual stresses and microstructure in a-tC films, article, July 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc794419/: accessed June 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.