Parallel-Plate Electrostatic Dual Mass Oscillator

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Description

A surface-micromachined two-degree-of-freedom system that was driven by parallel-plate actuation at antiresonance was demonstrated. The system consisted of an absorbing mass connected by folded springs to a drive mass. The system demonstrated substantial motion amplification at antiresonance. The absorber mass amplitudes were 0.8-0.85 pm at atmospheric pressure while the drive mass amplitudes were below 0.1 pm. Larger absorber mass amplitudes were not possible because of spring softening in the drive mass springs. Simple theory of the dual-mass oscillator has indicated that the absorber mass may be insensitive to limited variations in strain and damping. This needs experimental verification. Resonant and ... continued below

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12 p.

Creation Information

Allen, James J.; Dyck, Christopher W. & Huber, Robert J. July 22, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 21 times . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A surface-micromachined two-degree-of-freedom system that was driven by parallel-plate actuation at antiresonance was demonstrated. The system consisted of an absorbing mass connected by folded springs to a drive mass. The system demonstrated substantial motion amplification at antiresonance. The absorber mass amplitudes were 0.8-0.85 pm at atmospheric pressure while the drive mass amplitudes were below 0.1 pm. Larger absorber mass amplitudes were not possible because of spring softening in the drive mass springs. Simple theory of the dual-mass oscillator has indicated that the absorber mass may be insensitive to limited variations in strain and damping. This needs experimental verification. Resonant and antiresonant frequencies were measured and compared to the designed values. Resonant frequency measurements were difficult to compare to the design calculations because of time-varying spring softening terms that were caused by the drive configuration. Antiresonant frequency measurements were close to the design value of 5.1 kHz. The antiresonant frequency was not dependent on spring softening. The measured absorber mass displacement at antiresonance was compared to computer simulated results. The measured value was significantly greater, possibly due to neglecting fringe fields in the force expression used in the simulation.

Physical Description

12 p.

Notes

OSTI as DE00009509

Medium: P; Size: 12 pages

Source

  • Micromachining and Microfabrication Process Technology, Santa Clara, CA (US), 09/20/1999--09/23/1999

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  • Report No.: SAND99-0510C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 9509
  • Archival Resource Key: ark:/67531/metadc794217

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • July 22, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

Description Last Updated

  • April 6, 2017, 8:06 p.m.

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Allen, James J.; Dyck, Christopher W. & Huber, Robert J. Parallel-Plate Electrostatic Dual Mass Oscillator, article, July 22, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc794217/: accessed December 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.