Electronic Sputtering of Solids by Slow, Highly Charged Ions: Fundamentals and Applications

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Description

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

Physical Description

23 p.

Creation Information

Banks, J. C.; Barnes, A. V.; Doyle, B. L.; Hamza, A. V.; Machicoane, G. A.; McDonald, J. W. et al. July 23, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Characterization tools have been developed to study the performance characteristics and reliability of surface micromachined actuators. These tools include (1) the ability to electrically stimulate or stress the actuator, (2) the capability to visually inspect the devices in operation, (3) a method for capturing operational information, and (4) a method to extract performance characteristics from the operational information. Additionally, a novel test structure has been developed to measure electrostatic forces developed by a comb drive actuator.

Physical Description

23 p.

Notes

OSTI as DE00009668

Medium: P; Size: 23 pages

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  • International Conference on Ion Beam Analysis (IBA-14), Dresden (DE), 07/26/1999--07/31/1999

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  • Report No.: SAND99-1911C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 9668
  • Archival Resource Key: ark:/67531/metadc794138

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • July 23, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

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  • April 10, 2017, 3:45 p.m.

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Banks, J. C.; Barnes, A. V.; Doyle, B. L.; Hamza, A. V.; Machicoane, G. A.; McDonald, J. W. et al. Electronic Sputtering of Solids by Slow, Highly Charged Ions: Fundamentals and Applications, article, July 23, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc794138/: accessed September 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.