Calibration Procedures for a Two-Modulator Generalized Ellipsometer

PDF Version Also Available for Download.

Description

A Two-Modulator Generalized Ellipsometer (2-MGE) has been extremely useful in characterizing optical properties of uniaxial bulk materials, thin films and diffraction gratings. The instrument consists of two polarizer-photoelastic modulator pairs, one operating as the polarization state generator and the other as the polarization state detector. Each photoelastic modulator operates at a different remnant frequency (such as 50 kHz and 60 kHz), making it possible to measure eight elements of the reduced sample Mueller matrix simultaneously. In certain configurations, light reflection from non-depolarizing anisotropic samples can be completely characterized by a single measurement, and the entire reduced Jones matrix can be ... continued below

Physical Description

11 pages

Creation Information

Chen, C.; Jellison, G.E., Jr. & Modine, F.A. July 18, 1999.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Publisher

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

A Two-Modulator Generalized Ellipsometer (2-MGE) has been extremely useful in characterizing optical properties of uniaxial bulk materials, thin films and diffraction gratings. The instrument consists of two polarizer-photoelastic modulator pairs, one operating as the polarization state generator and the other as the polarization state detector. Each photoelastic modulator operates at a different remnant frequency (such as 50 kHz and 60 kHz), making it possible to measure eight elements of the reduced sample Mueller matrix simultaneously. In certain configurations, light reflection from non-depolarizing anisotropic samples can be completely characterized by a single measurement, and the entire reduced Jones matrix can be determined, including the cross polarization coefficients. The calibration of the instrument involves the measurement of the azimuthal angle of the polarizer with respect to the modulator, the modulation amplitude, and the modulator strain for each polarizer photoelastic modulator pair, where the last two are functions of wavelengths. In addition, it is essential to calibrate the azimuthal angles of the polarization state generator and the polarization state detector with respect to the plane of incidence in the ellipsometry configuration that is used in the measurements. Because two modulators operating at different frequencies are used, these calibrations are actually easier and more accurate than for one modulator ellipsometers. In this paper, we will discuss these calibrations and the resultant accuracy limitations of the 2-MGE.

Physical Description

11 pages

Subjects

Source

  • SPIE's 44th Annual Meeting, International Symposium on Optical Science, Engineering, and Instrumentation, Denver, CO, July 18-23, 1999

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Other: DE00009870
  • Report No.: ORNL/CP-103562
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 9870
  • Archival Resource Key: ark:/67531/metadc793370

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • July 18, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

Description Last Updated

  • Oct. 31, 2017, 2:43 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 0
Total Uses: 3

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

Citations, Rights, Re-Use

Chen, C.; Jellison, G.E., Jr. & Modine, F.A. Calibration Procedures for a Two-Modulator Generalized Ellipsometer, article, July 18, 1999; Oak Ridge, Tennessee. (digital.library.unt.edu/ark:/67531/metadc793370/: accessed December 13, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.