Optical Readout of Micro-Accelerometer Code Features

PDF Version Also Available for Download.

Description

Micromachine accelerometers offer a way to enable critical functions only when a system encounters a particular acceleration environment. This paper describes the optical readout of a surface micromachine accelerometer containing a unique 24-bit code. The readout uses waveguide-based optics, which are implemented as a photonic integrated circuit (PIC). The PIC is flip-chip bonded over the micromachine, for a compact package. The shuttle moves 500 {micro}m during readout, and each code element is 17 {micro}m wide. The particular readout scheme makes use of backscattered radiation from etched features in the accelerometer shuttle. The features are etched to create corner reflectors that ... continued below

Physical Description

8 p.

Creation Information

Dickey, Fred M.; Holswade, Scott C.; Polosky, Marc A.; Shagam, Richard N. & Sullivan, Charles T. July 8, 1999.

Context

This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

Who

People and organizations associated with either the creation of this article or its content.

Sponsor

Publisher

  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

Provided By

UNT Libraries Government Documents Department

Serving as both a federal and a state depository library, the UNT Libraries Government Documents Department maintains millions of items in a variety of formats. The department is a member of the FDLP Content Partnerships Program and an Affiliated Archive of the National Archives.

Contact Us

What

Descriptive information to help identify this article. Follow the links below to find similar items on the Digital Library.

Description

Micromachine accelerometers offer a way to enable critical functions only when a system encounters a particular acceleration environment. This paper describes the optical readout of a surface micromachine accelerometer containing a unique 24-bit code. The readout uses waveguide-based optics, which are implemented as a photonic integrated circuit (PIC). The PIC is flip-chip bonded over the micromachine, for a compact package. The shuttle moves 500 {micro}m during readout, and each code element is 17 {micro}m wide. The particular readout scheme makes use of backscattered radiation from etched features in the accelerometer shuttle. The features are etched to create corner reflectors that return radiation back toward the source for a one bit. For a zero bit, the shuttle is not etched, and the radiation scatters forward, away from the detector. This arrangement provides a large signal difference between a one and zero signal, since the zero signal returns virtually no signal to the detector. It is thus superior to schemes that interrogate the code vertically, which have a limited contrast between a one and a zero. Experimental results are presented for mock shuttle features etched into a silicon substrate. To simulate the shuttle moving under a fixed PIC, a commercially available waveguide source was scanned over the mock code.

Physical Description

8 p.

Notes

OSTI as DE00008855

Medium: P; Size: 8 pages

Source

  • SPIE's 1999 Symposium on Micromachining and Microfabrication, Santa Clara, CA (US), 09/19/1999--09/23/1999

Language

Item Type

Identifier

Unique identifying numbers for this article in the Digital Library or other systems.

  • Report No.: SAND98-2583C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 8855
  • Archival Resource Key: ark:/67531/metadc793073

Collections

This article is part of the following collection of related materials.

Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

What responsibilities do I have when using this article?

When

Dates and time periods associated with this article.

Creation Date

  • July 8, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

Description Last Updated

  • April 11, 2017, 6:03 p.m.

Usage Statistics

When was this article last used?

Yesterday: 0
Past 30 days: 2
Total Uses: 6

Interact With This Article

Here are some suggestions for what to do next.

Start Reading

PDF Version Also Available for Download.

International Image Interoperability Framework

IIF Logo

We support the IIIF Presentation API

Dickey, Fred M.; Holswade, Scott C.; Polosky, Marc A.; Shagam, Richard N. & Sullivan, Charles T. Optical Readout of Micro-Accelerometer Code Features, article, July 8, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc793073/: accessed November 14, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.