Pulsed-laser deposition of titanium nitride

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The pulsed-laser deposition technique has been used to form thin films of TiN on (100)oriented single crystal substrates of silicon and rocksalt. Using atomic force microscopy, it was revealed that TiN films grown on silicon at substrate temperatures ranging from 50 C to 500 C were extremely smooth -- the mean roughness being {approximately} 0.2 nm. Thin TiN films deposited on freshly cleaved NaCl were found to be epitaxial at substrate temperatures as low as 50 C. Epitaxy in this latter system is believed to be due to the structural similarity between film and substrate and the almost exact 4:3 ... continued below

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7 p.

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Jiang, Wenbiao; Norton, M. G.; Dickinson, J. T. & Evans, N. D. April 1, 1995.

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Description

The pulsed-laser deposition technique has been used to form thin films of TiN on (100)oriented single crystal substrates of silicon and rocksalt. Using atomic force microscopy, it was revealed that TiN films grown on silicon at substrate temperatures ranging from 50 C to 500 C were extremely smooth -- the mean roughness being {approximately} 0.2 nm. Thin TiN films deposited on freshly cleaved NaCl were found to be epitaxial at substrate temperatures as low as 50 C. Epitaxy in this latter system is believed to be due to the structural similarity between film and substrate and the almost exact 4:3 coincident site lattice.

Physical Description

7 p.

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OSTI as DE95014584

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE95014584
  • Report No.: CONF-950412--25
  • Grant Number: AC05-84OR21400;AC05-76OR00033
  • Office of Scientific & Technical Information Report Number: 95287
  • Archival Resource Key: ark:/67531/metadc792942

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Office of Scientific & Technical Information Technical Reports

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  • April 1, 1995

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  • Dec. 19, 2015, 7:14 p.m.

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  • Oct. 3, 2017, 1:06 p.m.

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Jiang, Wenbiao; Norton, M. G.; Dickinson, J. T. & Evans, N. D. Pulsed-laser deposition of titanium nitride, article, April 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc792942/: accessed September 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.