Gas Chromatography-Mass Spectroscopy Study of tert-Butylarsine Stability and Purification

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TBA (tert-butylarsine, H{sub 2}AsC(CH{sub 3}){sub 3}) has been demonstrated to be an effective arsenic precursor for the deposition of compound semiconductors such as GaAs by MOCVD (metal organic chemical vapor deposition). TBA is used as a liquid (bubbler) source in MOCVD and is a less toxic alternative to the more commonly used gaseous arsine (AsH{sub 3}). Materials and device performance using TBA have in many cases equaled or surpassed those using arsine. This includes the first observation of fractional quantum Hall behavior in a two dimensional electron gas structure grown by MOCVD. Despite the beneficial characteristics, the use of TBA ... continued below

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7 p.

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Bartram, M.E.; Breiland, W.G.; Bruskas, L.A. & Killeen, K.P. July 20, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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TBA (tert-butylarsine, H{sub 2}AsC(CH{sub 3}){sub 3}) has been demonstrated to be an effective arsenic precursor for the deposition of compound semiconductors such as GaAs by MOCVD (metal organic chemical vapor deposition). TBA is used as a liquid (bubbler) source in MOCVD and is a less toxic alternative to the more commonly used gaseous arsine (AsH{sub 3}). Materials and device performance using TBA have in many cases equaled or surpassed those using arsine. This includes the first observation of fractional quantum Hall behavior in a two dimensional electron gas structure grown by MOCVD. Despite the beneficial characteristics, the use of TBA in our laboratories has revealed some inconsistent behavior. Small pressure rises have been observed in the TBA bubbler sources when left unused over a period of many days. Measurements of the TBA partial pressure using UV absorption revealed that new absorption peaks could be observed after storage. The features of the absorption profile were insufficient to ascribe to a specific chemical species. Attempts to remove the gaseous impurities with liquid nitrogen freeze-pump-thaw techniques had limited success. Unfortunately, there is no published information on the room temperature decomposition of TBA. In this paper, we present a series of GCMS (gas chromatography-mass spectroscopy) analyses designed to determine the stability of TBA and identify its decomposition products in storage containers. The GCMS is also used to evaluate several methods for in-situ purification of TBA.

Physical Description

7 p.

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OSTI as DE00009477

Medium: P; Size: 7 pages

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  • Journal Name: Journal of Crystal Growth; Other Information: Submitted to Journal of Crystal Growth

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  • Report No.: SAND99-1915J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 9477
  • Archival Resource Key: ark:/67531/metadc792739

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  • July 20, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

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  • April 11, 2017, 3:27 p.m.

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Bartram, M.E.; Breiland, W.G.; Bruskas, L.A. & Killeen, K.P. Gas Chromatography-Mass Spectroscopy Study of tert-Butylarsine Stability and Purification, article, July 20, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc792739/: accessed September 23, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.