Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)

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Description

A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

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6 p.

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Allen, J.J.; Jakubczak, J.F.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S. et al. July 9, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 89 times , with 8 in the last month . More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A review is made of the infrastructure, technology and capabilities of Sandia National Laboratories for the development of micromechanical systems. By incorporating advanced fabrication processes, such as chemical mechanical polishing, and several mechanical polysilicon levels, the range of micromechanical systems that can be fabricated in these technologies is virtually limitless. Representative applications include a micro-engine driven mirror, and a micromachined lock. Using a novel integrated MEMS/CMOS technology, a six degree-of-freedom accelerometer/gyroscope system has been designed by researchers at U.C. Berkeley and fabricated on the same silicon chip as the CMOS control circuits to produce an integrated micro-navigational unit.

Physical Description

6 p.

Notes

OSTI as DE00008955

Medium: P; Size: 6 pages

Source

  • Sensors Expo, Cleveland, OH (US), 09/14/1999--09/16/1999

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  • Report No.: SAND99-1734C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 8955
  • Archival Resource Key: ark:/67531/metadc792571

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • July 9, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

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  • April 11, 2017, 2:34 p.m.

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Allen, J.J.; Jakubczak, J.F.; Krygowski, T.W.; Miller, S.L.; Montague, S.; Rodgers, M.S. et al. Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS), article, July 9, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc792571/: accessed December 9, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.