Optimization of Micromachined Photon Devices

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Description

The Oak Ridge National Laboratory has been instrumental in developing ultraprecision technologies for the fabrication of optical devices. We are currently extending our ultraprecision capabilities to the design, fabrication, and testing of micro-optics and MEMS devices. Techniques have been developed in our lab for fabricating micro-devices using single point diamond turning and ion milling. The devices we fabricated can be used in micro-scale interferometry, micro-positioners, micro-mirrors, and chemical sensors. In this paper, we focus on the optimization of microstructure performance using finite element analysis and the experimental validation of those results. We also discuss the fabrication of such structures and ... continued below

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9 pages

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Datskos, P.G.; Datskou, I.; Evans, B.M., III & Rajic, S. July 18, 1999.

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Description

The Oak Ridge National Laboratory has been instrumental in developing ultraprecision technologies for the fabrication of optical devices. We are currently extending our ultraprecision capabilities to the design, fabrication, and testing of micro-optics and MEMS devices. Techniques have been developed in our lab for fabricating micro-devices using single point diamond turning and ion milling. The devices we fabricated can be used in micro-scale interferometry, micro-positioners, micro-mirrors, and chemical sensors. In this paper, we focus on the optimization of microstructure performance using finite element analysis and the experimental validation of those results. We also discuss the fabrication of such structures and the optical testing of the devices. The performance is simulated using finite element analysis to optimize geometric and material parameters. The parameters we studied include bimaterial coating thickness effects; device length, width, and thickness effects, as well as changes in the geometry itself. This optimization results in increased sensitivity of these structures to absorbed incoming energy, which is important for photon detection or micro-mirror actuation. We have investigated and tested multiple geometries. The devices were fabricated using focused ion beam milling, and their response was measured using a chopped photon source and laser triangulation techniques. Our results are presented and discussed.

Physical Description

9 pages

Notes

OSTI as DE00009397

Source

  • SPIE's International Symposium on Optical Science Engineering and Instrumentation, Denver, CO (US), 07/18/1999--07/23/1999

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  • Report No.: ORNL/CP-103748
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 9397
  • Archival Resource Key: ark:/67531/metadc792565

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • July 18, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

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  • Jan. 22, 2016, 12:59 p.m.

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Datskos, P.G.; Datskou, I.; Evans, B.M., III & Rajic, S. Optimization of Micromachined Photon Devices, article, July 18, 1999; Tennessee. (digital.library.unt.edu/ark:/67531/metadc792565/: accessed December 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.