X-ray characterization of a four-bounce projection system

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Description

A four-bounce two-element projection system designed to achieve 0.14 {mu}m resolution over a 1.2 {times} 5 mm{sup 2} ring field has been fabricated. The radiation transport properties of both the individual multilayer-coated optics and the assembled system has been measured. The individual mirror measurements demonstrated that the coatings were within 0.03 nm of d-spacing specifications; however, the mirrors exhibited significant scatter which reduced reflectance below the design specification of 60%. The peak radiation transport efficiency of the assembled projector was 7% at 13.2 nm. To the best of the authors` knowledge, this represented the first measurement of the radiation transport ... continued below

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8 p.

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Gaines, D.P.; Vernon, S.P.; Sommargren, G.E. & Fuchs, D. January 19, 1995.

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Description

A four-bounce two-element projection system designed to achieve 0.14 {mu}m resolution over a 1.2 {times} 5 mm{sup 2} ring field has been fabricated. The radiation transport properties of both the individual multilayer-coated optics and the assembled system has been measured. The individual mirror measurements demonstrated that the coatings were within 0.03 nm of d-spacing specifications; however, the mirrors exhibited significant scatter which reduced reflectance below the design specification of 60%. The peak radiation transport efficiency of the assembled projector was 7% at 13.2 nm. To the best of the authors` knowledge, this represented the first measurement of the radiation transport efficiency of a multi-element optical system for EUV lithography. Experiments performed at LLNL`s front-end test bed facility were consistent with the measured transport efficiency.

Physical Description

8 p.

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OSTI as DE95014676

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  • Optical Society of America conference on extreme ultraviolet lithography, Monterey, CA (United States), 19-21 Sep 1994

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  • Other: DE95014676
  • Report No.: UCRL-JC--119628
  • Report No.: CONF-9409177--14
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 91976
  • Archival Resource Key: ark:/67531/metadc791857

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  • January 19, 1995

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  • Dec. 19, 2015, 7:14 p.m.

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  • Feb. 23, 2016, 12:58 p.m.

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Gaines, D.P.; Vernon, S.P.; Sommargren, G.E. & Fuchs, D. X-ray characterization of a four-bounce projection system, article, January 19, 1995; California. (digital.library.unt.edu/ark:/67531/metadc791857/: accessed September 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.