Modeling and Imaging Flexural Plate Wave Devices

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Description

Sandia National Laboratories is developing a new form of flexural plate wave device (FPW) for sensor applications. In this device, Lorentz forces cause out of plane vibrations in a silicon nitride membrane. Current induced in transducer lines on the membrane provides information about the amplitude and phase of these surface vibrations. By tracking the large amplitude vibrations that occur at resonant frequencies, it is possible to infer information about loading on the membrane. In fabricating FPWs, it is important to understand the impact that minor defects can have on operation. Through modeling and testing, they are developing resilient designs that ... continued below

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5 p.

Creation Information

Adkins, D.R.; Butler, M.A.; Chu, A.S. & Schubert, W.K. July 9, 1999.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Sandia National Laboratories is developing a new form of flexural plate wave device (FPW) for sensor applications. In this device, Lorentz forces cause out of plane vibrations in a silicon nitride membrane. Current induced in transducer lines on the membrane provides information about the amplitude and phase of these surface vibrations. By tracking the large amplitude vibrations that occur at resonant frequencies, it is possible to infer information about loading on the membrane. In fabricating FPWs, it is important to understand the impact that minor defects can have on operation. Through modeling and testing, they are developing resilient designs that provide large amplitude signals with a high tolerance to defects. A finite element model has been developed to perform design trade-off studies, and results from the model are being verified with a unique measurement system that can image Angstrom scale displacements at vibrational frequencies up to 800 kHz. Results from FPW modeling and imaging efforts are presented in this paper.

Physical Description

5 p.

Notes

OSTI as DE00008865

Medium: P; Size: 5 pages

Source

  • ASME 1999 International Mechanical Engineering Congress and Exposition, Nashville, TN (US), 11/14/1999--11/19/1999

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  • Report No.: SAND99-1012C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 8865
  • Archival Resource Key: ark:/67531/metadc791778

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • July 9, 1999

Added to The UNT Digital Library

  • Dec. 19, 2015, 7:14 p.m.

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  • April 11, 2017, 12:25 p.m.

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Adkins, D.R.; Butler, M.A.; Chu, A.S. & Schubert, W.K. Modeling and Imaging Flexural Plate Wave Devices, article, July 9, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc791778/: accessed July 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.