Sputter deposition of ZnS:Mn/SrS:Ce multilayer stacks for use as white phosphor thin film electroluminscent panels

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Sputter deposition of ZnS:Mn/SrS:Ce multilayered broad-band ``white`` emission thin film electroluminescent (TFEL) stacks has been investigated. To date, deposition of these multilayers has been limited to vacuum evaporation techniques and atomic layer epitaxy, both of which require two different substrate temperatures for growth of high quality ZnS and SrS. This repeated thermal cycling during multilayer deposition can induce stress, defects, and interdiffusion with adversely affect EL performance. Sputter deposition of ZnS and SrS produces high quality TFELs for a wider range of substrate temperatures. Both materials can be sputter deposited at a common temperature (300-350{degrees}C) which eliminates the need for ... continued below

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12 p.

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Ruffner, J.A.; Tuenge, R.T. & Sun, Sey-Shing July 1, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Sputter deposition of ZnS:Mn/SrS:Ce multilayered broad-band ``white`` emission thin film electroluminescent (TFEL) stacks has been investigated. To date, deposition of these multilayers has been limited to vacuum evaporation techniques and atomic layer epitaxy, both of which require two different substrate temperatures for growth of high quality ZnS and SrS. This repeated thermal cycling during multilayer deposition can induce stress, defects, and interdiffusion with adversely affect EL performance. Sputter deposition of ZnS and SrS produces high quality TFELs for a wider range of substrate temperatures. Both materials can be sputter deposited at a common temperature (300-350{degrees}C) which eliminates the need for thermal cycling and increases manufacturability. Luminance outputs from sputter deposited ZnS and SrS thin films are comparable to those from evaporated films, making sputtering an attractive alternative deposition technique for these materials. We report on the effects of sputter deposition parameters including chamber pressure, substrate temperature, and H2S process gas partial pressure on the resultant composition and morphology of ZnS:Mn and SrS:Ce thin films and multilayers. Their EL performance was evaluated and correlated to composition and morphology.

Physical Description

12 p.

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OSTI as DE95015080

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  • 27. international technical conference of the Society for the Advancement of Material and Process Engineering (SAMPE): diversity into the next century, Albuquerque, NM (United States), 9-12 Oct 1995

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  • Other: DE95015080
  • Report No.: SAND--95-1496C
  • Report No.: CONF-951033--4
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 93482
  • Archival Resource Key: ark:/67531/metadc791532

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • July 1, 1995

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  • Dec. 19, 2015, 7:14 p.m.

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  • April 14, 2016, 8:47 p.m.

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Ruffner, J.A.; Tuenge, R.T. & Sun, Sey-Shing. Sputter deposition of ZnS:Mn/SrS:Ce multilayer stacks for use as white phosphor thin film electroluminscent panels, article, July 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc791532/: accessed April 25, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.