Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties

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A comparative study of ArF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp{sup 3} bonded carbon in 7 J/cm{sup 2} -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by ArF- and KrF- lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic ... continued below

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8 p.

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Puretzky, A.A.; Geohegan, D.B. & Jellison, G.E. Jr. April 1, 1995.

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A comparative study of ArF- and KrF-laser deposition of amorphous diamond-like carbon (DLC) films and relevant carbon plasmas has been performed. Spectroscopic ellipsometry and EELS analysis of the DLC films deposited on Si <100> and NaCl substrates were utilized to characterize the high quality ArF- and KrF-laser deposited films (up to 84% of sp{sup 3} bonded carbon in 7 J/cm{sup 2} -ArF-laser DLC film). Gated ICCD imaging, luminescence and ion current probe diagnostics of the carbon plume have revealed quite different properties of carbon plasmas generated by ArF- and KrF- lasers. KrF-laser (6.7 J/cm{sup 2}) irradiation produces a less energetic carbon plasma containing larger amounts of C{sub 2} and probably larger clusters compared with ArF-laser irradiation at the same energy fluence. We conclude that the more energetic and highly-atomized ArF-laser carbon plasma results in the better diamond-like properties.

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8 p.

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OSTI as DE95013987

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE95013987
  • Report No.: CONF-950412--21
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 83103
  • Archival Resource Key: ark:/67531/metadc787667

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  • April 1, 1995

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  • Dec. 3, 2015, 9:30 a.m.

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  • Jan. 15, 2016, 12:42 p.m.

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Puretzky, A.A.; Geohegan, D.B. & Jellison, G.E. Jr. Amorphous diamond-like carbon film growth by KrF- and ArF- excimer laser PLD: Correlation with plume properties, article, April 1, 1995; Tennessee. (digital.library.unt.edu/ark:/67531/metadc787667/: accessed November 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.