Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers

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In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the ... continued below

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Johnson, Raegan Lynn August 1, 2005.

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This thesis or dissertation is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 36 times . More information about this document can be viewed below.

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  • Ames Laboratory
    Publisher Info: AMES (Ames Laboratory (AMES), Ames, IA)
    Place of Publication: Ames, Iowa

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Description

In Atomic Force Microscopy (AFM), a microcantilever is raster scanned across the surface of a sample in order to obtain a topographical image of the sample's surface. In a traditional, optical AFM, the sample rests on a bulk piezoelectric tube and a control loop is used to control the tip-sample separation by actuating the piezo-tube. This method has several disadvantages--the most noticeable one being that response time of the piezo-tube is rather long which leads to slow imaging speeds. One possible solution aimed at improving the speed of imaging is to incorporate a thin piezoelectric film on top of the cantilever beam. This design not only improves the speed of imaging because the piezoelectric film replaces the piezo-tube as an actuator, but the film can also act as a sensor. In addition, the piezoelectric film can excite the cantilever beam near its resonance frequency. This project aims to fabricate piezoelectric microcantilevers for use in the AFM. Prior to fabricating the cantilevers and also part of this project, a systematic study was performed to examine the effects of deposition conditions on the quality of piezoelectric ZnO thin films deposited by RF sputtering. These results will be presented. The deposition parameters that produced the highest quality ZnO film were used in the fabrication of the piezoelectric cantilevers. Unfortunately, the fabricated cantilevers warped due to the intrinsic stress of the ZnO film and were therefore not usable in the AFM. The complete fabrication process will be detailed, the results will be discussed and reasons for the warping will be examined.

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2907 Kb

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  • Report No.: IS-T 2444
  • Grant Number: W-7405-ENG-82
  • Office of Scientific & Technical Information Report Number: 850081
  • Archival Resource Key: ark:/67531/metadc786953

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  • August 1, 2005

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  • Dec. 3, 2015, 9:30 a.m.

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  • Nov. 3, 2016, 11:37 a.m.

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Johnson, Raegan Lynn. Characterization of piesoelectric ZnO thin films and the fabrication of piezoelectric micro-cantilevers, thesis or dissertation, August 1, 2005; Ames, Iowa. (digital.library.unt.edu/ark:/67531/metadc786953/: accessed August 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.