Reaching sub-Angstrom resolution with a mid-voltage TEM

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Phase-contrast imaging in the high-resolution electron microscope produces images with peaks at atom positions by extracting the spatial distribution of the relative phase from the electron wave. Usually, the electron wave is imaged by direct interference of diffracted beams at optimum focus. Instead, the One-Angstrom Microscope uses focal-series reconstruction software to derive the relative electron phase from a series of images taken over a range of focus, with peaks that correspond to the atom positions at a resolution that extends to the microscope information limit. Tests using a silicon specimen tilted into [112] orientation show that the O Angstrom M ... continued below

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O'Keefe, Michael A.; Hetherington, Crispin J.D. & Nelson, E. Chris April 12, 2004.

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Phase-contrast imaging in the high-resolution electron microscope produces images with peaks at atom positions by extracting the spatial distribution of the relative phase from the electron wave. Usually, the electron wave is imaged by direct interference of diffracted beams at optimum focus. Instead, the One-Angstrom Microscope uses focal-series reconstruction software to derive the relative electron phase from a series of images taken over a range of focus, with peaks that correspond to the atom positions at a resolution that extends to the microscope information limit. Tests using a silicon specimen tilted into [112] orientation show that the O Angstrom M has achieved a world-record resolution of 0.78 Angstrom.

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OSTI as DE00824287

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  • Other Information: PBD: 12 Apr 2004

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  • Report No.: LBNL--54892
  • Grant Number: AC03-76SF00098
  • DOI: 10.2172/824287 | External Link
  • Office of Scientific & Technical Information Report Number: 824287
  • Archival Resource Key: ark:/67531/metadc785941

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Office of Scientific & Technical Information Technical Reports

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  • April 12, 2004

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  • Dec. 3, 2015, 9:30 a.m.

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  • April 4, 2016, 2:14 p.m.

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O'Keefe, Michael A.; Hetherington, Crispin J.D. & Nelson, E. Chris. Reaching sub-Angstrom resolution with a mid-voltage TEM, report, April 12, 2004; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc785941/: accessed April 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.