Performance evaluation of cleanroom environmental systems

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Description

This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices ... continued below

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13 pages

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Xu, Tengfang July 7, 2003.

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Description

This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance.

Physical Description

13 pages

Notes

OSTI as DE00838604

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  • Journal Name: Journal of the Illuminating Engineering Society; Journal Volume: 46; Other Information: Submitted to Journal of the Illuminating Engineering Society: Volume 46; Journal Publication Date: August 2003

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  • Report No.: LBNL--53282
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 838604
  • Archival Resource Key: ark:/67531/metadc785440

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  • July 7, 2003

Added to The UNT Digital Library

  • Dec. 3, 2015, 9:30 a.m.

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  • April 4, 2016, 1:53 p.m.

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Xu, Tengfang. Performance evaluation of cleanroom environmental systems, article, July 7, 2003; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc785440/: accessed August 17, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.