Preparation of diamond-like carbon and boron nitirde films by high-intensity pulsed ion beam deposition

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Intense ion beams (300-keV C{sup +}, O{sup +}, and H{sup +}, 20--30 kA, 50 to 400-ns pulsewidth, up to 0.3-Hz repetition rate) were used to prepare diamond-like carbon (DLC) and boron nitride (BN) films. Deposition rates of up to 25{plus_minus}5 nm/pulse were obtained with instantaneous rates exceeding 1 mm/s. Most films were uniform, light brown, translucent, and nonporous with some micron-size particulates. Raman and parallel electron energy loss spectroscopy indicated the presence of DLC. The films possessed favorable electron field-emission characteristics desirable for cold-cathode displays. Transmission electron microscopy (TEM) and transmission electron diffraction (TED) revealed that the C films contained ... continued below

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5 p.

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Rej, D.J.; Davis, H.A. & Remnev, G.E. May 1, 1995.

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  • Rej, D.J.
  • Davis, H.A. Los Alamos National Lab., NM (United States)
  • Remnev, G.E. Tomsk Polytechnic Univ., Tomsk (Russian Federation). Nuclear Physics Institute.

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Intense ion beams (300-keV C{sup +}, O{sup +}, and H{sup +}, 20--30 kA, 50 to 400-ns pulsewidth, up to 0.3-Hz repetition rate) were used to prepare diamond-like carbon (DLC) and boron nitride (BN) films. Deposition rates of up to 25{plus_minus}5 nm/pulse were obtained with instantaneous rates exceeding 1 mm/s. Most films were uniform, light brown, translucent, and nonporous with some micron-size particulates. Raman and parallel electron energy loss spectroscopy indicated the presence of DLC. The films possessed favorable electron field-emission characteristics desirable for cold-cathode displays. Transmission electron microscopy (TEM) and transmission electron diffraction (TED) revealed that the C films contained diamond crystals with 25 to 125-nm grain size. BN films were composed of hexagonal, cubic and wurtzite phases.

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5 p.

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OSTI as DE95012076

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  • International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995

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  • Other: DE95012076
  • Report No.: LA-UR--95-1245
  • Report No.: CONF-950840--2
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 83107
  • Archival Resource Key: ark:/67531/metadc785109

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  • May 1, 1995

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  • Dec. 3, 2015, 9:30 a.m.

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  • March 1, 2016, 1:15 p.m.

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Rej, D.J.; Davis, H.A. & Remnev, G.E. Preparation of diamond-like carbon and boron nitirde films by high-intensity pulsed ion beam deposition, article, May 1, 1995; New Mexico. (digital.library.unt.edu/ark:/67531/metadc785109/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.