Cleanroom energy benchmarking results

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Description

A utility market transformation project studied energy use and identified energy efficiency opportunities in cleanroom HVAC design and operation for fourteen cleanrooms. This paper presents the results of this work and relevant observations. Cleanroom owners and operators know that cleanrooms are energy intensive but have little information to compare their cleanroom's performance over time, or to others. Direct comparison of energy performance by traditional means, such as watts/ft{sup 2}, is not a good indicator with the wide range of industrial processes and cleanliness levels occurring in cleanrooms. In this project, metrics allow direct comparison of the efficiency of HVAC systems ... continued below

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12 pages

Creation Information

Tschudi, William & Xu, Tengfang September 1, 2001.

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Description

A utility market transformation project studied energy use and identified energy efficiency opportunities in cleanroom HVAC design and operation for fourteen cleanrooms. This paper presents the results of this work and relevant observations. Cleanroom owners and operators know that cleanrooms are energy intensive but have little information to compare their cleanroom's performance over time, or to others. Direct comparison of energy performance by traditional means, such as watts/ft{sup 2}, is not a good indicator with the wide range of industrial processes and cleanliness levels occurring in cleanrooms. In this project, metrics allow direct comparison of the efficiency of HVAC systems and components. Energy and flow measurements were taken to determine actual HVAC system energy efficiency. The results confirm a wide variation in operating efficiency and they identify other non-energy operating problems. Improvement opportunities were identified at each of the benchmarked facilities. Analysis of the best performing systems and components is summarized, as are areas for additional investigation.

Physical Description

12 pages

Notes

OSTI as DE00840976

Source

  • ASHRAE 2003 Annual Meeting, Kansas City, MO (US), 06/28/2003--07/02/2003

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  • Report No.: LBNL--50219
  • Report No.: HT-479
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 840976
  • Archival Resource Key: ark:/67531/metadc784920

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • September 1, 2001

Added to The UNT Digital Library

  • Dec. 3, 2015, 9:30 a.m.

Description Last Updated

  • April 4, 2016, 12:26 p.m.

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Tschudi, William & Xu, Tengfang. Cleanroom energy benchmarking results, article, September 1, 2001; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc784920/: accessed May 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.