Soft X-ray photoemission studies of Hf oxidation

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Soft X-Ray Photoemission Spectroscopy using surface sensitive Synchrotron Radiation has been applied to accurately determine the binding energy shifts and the valence band offset of the HfO2 grown on Hf metal. Charging of oxide films under x-rays (or other irradiation) is circumvented by controlled and sequential in-situ oxidation. Photoemission results show the presence of metallic Hf (from the substrate) with the 4f7/2 binding energy of 14.22 eV, fully oxidized Hf (from HfO2) with the 4f7/2 binding energy of 18.16 eV, and at least one clear suboxide peak. The position of the valence band of HfO2 with respect to the Hf(m) ... continued below

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Suzer, S.; Sayan, S.; Banaszak Holl, M.M.; Garfunkel, E.; Hussain, Z. & Hamdan, N.M. February 1, 2002.

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Soft X-Ray Photoemission Spectroscopy using surface sensitive Synchrotron Radiation has been applied to accurately determine the binding energy shifts and the valence band offset of the HfO2 grown on Hf metal. Charging of oxide films under x-rays (or other irradiation) is circumvented by controlled and sequential in-situ oxidation. Photoemission results show the presence of metallic Hf (from the substrate) with the 4f7/2 binding energy of 14.22 eV, fully oxidized Hf (from HfO2) with the 4f7/2 binding energy of 18.16 eV, and at least one clear suboxide peak. The position of the valence band of HfO2 with respect to the Hf(m) Fermi level is determined as 4.05 eV.

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  • Journal Name: Journal of Vacuum Science & Technology A - Vacuum Surfaces and Films; Journal Volume: 21; Journal Issue: 1; Other Information: Journal Publication Date: Jan./Feb. 2003

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  • Report No.: LBNL--50832
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 825308
  • Archival Resource Key: ark:/67531/metadc783272

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  • February 1, 2002

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  • Dec. 3, 2015, 9:30 a.m.

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  • Sept. 25, 2017, 4:09 p.m.

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Suzer, S.; Sayan, S.; Banaszak Holl, M.M.; Garfunkel, E.; Hussain, Z. & Hamdan, N.M. Soft X-ray photoemission studies of Hf oxidation, article, February 1, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc783272/: accessed October 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.