Sample method for formation of nanometer scale holes in membranes

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When nanometer scale holes (diameters of 50 to a few hundred nm) are imaged in a scanning electron microscope (SEM) at pressures in the 10{sup -5} to 10{sup -6} torr range, hydrocarbon deposits built up and result in the closing of holes within minutes of imaging. Additionally, electron beam deposition of material from a gas source allows the closing of holes with films of platinum or TEOS oxide. In an instrument equipped both with a focused ion beam (FIB), and an SEM, holes can be formed and then covered with a thin film to form nanopores with controlled openings, ranging ... continued below

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10 pages

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Schenkel, T.; Stach, E.A.; Radmilovic, V.; Park, S.-J. & Persaud, A. February 24, 2003.

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Description

When nanometer scale holes (diameters of 50 to a few hundred nm) are imaged in a scanning electron microscope (SEM) at pressures in the 10{sup -5} to 10{sup -6} torr range, hydrocarbon deposits built up and result in the closing of holes within minutes of imaging. Additionally, electron beam deposition of material from a gas source allows the closing of holes with films of platinum or TEOS oxide. In an instrument equipped both with a focused ion beam (FIB), and an SEM, holes can be formed and then covered with a thin film to form nanopores with controlled openings, ranging down to only a few nanometers.

Physical Description

10 pages

Notes

INIS; OSTI as DE00841696

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  • Journal Name: Applied Physics Journal; Journal Volume: 21; Journal Issue: 6; Other Information: Submitted to Applied Physics Journal: Volume 21, No.6; Journal Publication Date: Nov/Dec 2003

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  • Report No.: LBNL--52206
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 841696
  • Archival Resource Key: ark:/67531/metadc782311

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 24, 2003

Added to The UNT Digital Library

  • Dec. 3, 2015, 9:30 a.m.

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  • June 22, 2016, 3:53 p.m.

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Schenkel, T.; Stach, E.A.; Radmilovic, V.; Park, S.-J. & Persaud, A. Sample method for formation of nanometer scale holes in membranes, article, February 24, 2003; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc782311/: accessed December 11, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.