Nitrogen effects on crystallization kinetics of amorphous TiOxNy thin films Metadata

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Title

  • Main Title Nitrogen effects on crystallization kinetics of amorphous TiOxNy thin films

Creator

  • Author: Hukari, Kyle
    Creator Type: Personal
  • Author: Dannenberg, Rand
    Creator Type: Personal
  • Author: Stach, E.A.
    Creator Type: Personal

Contributor

  • Sponsor: USDOE Director, Office of Science. Office of Basic Energy Sciences. Division of Materials Sciences (United States)
    Contributor Type: Organization

Publisher

  • Name: Lawrence Berkeley National Laboratory
    Place of Publication: Berkeley, California
    Additional Info: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (United States)

Date

  • Creation: 2001-03-30

Language

  • English

Description

  • Content Description: The crystallization behavior of amorphous TiOxNy (x>>y) thin films was investigated by in-situ transmission electron microscopy. The Johnson-Mehl-Avrami-Kozolog (JMAK) theory is used to determine the Avrami exponent, activation energy, and the phase velocity pre-exponent. Addition of nitrogen inhibits diffusion, increasing the nucleation temperature, while decreasing the growth activation energy. Kinetic variables extracted from individual crystallites are compared to JMAK analysis of the fraction transformed and a change of 6 percent in the activation energy gives agreement between the methods. From diffraction patterns and index of refraction the crystallized phase was found to be predominantly anatase.
  • Physical Description: vp.

Subject

  • Keyword: Diffusion
  • Keyword: Crystallization Grain Growth In-Situ Transmission Electron Microscopy
  • Keyword: Nitrogen
  • Keyword: Refractive Index
  • Keyword: Phase Velocity
  • Keyword: Diffraction
  • Keyword: Kinetics
  • Keyword: Transmission Electron Microscopy Crystallization Grain Growth In-Situ Transmission Electron Microscopy
  • Keyword: Thin Films
  • Keyword: Nucleation
  • Keyword: Crystallization
  • STI Subject Categories: 36 Materials Science
  • Keyword: Activation Energy

Source

  • Journal Name: Journal of Materials Research; Journal Volume: 17; Journal Issue: 3; Other Information: Submitted to Journal of Materials Research: Volume 17, No.3; Journal Publication Date: 03/2002

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Report No.: LBNL--47681
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 835806
  • Archival Resource Key: ark:/67531/metadc782309

Note

  • Display Note: OSTI as DE00835806
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