Observation of self-sputtering in energetic condensation of metal ions

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The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached-50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum ... continued below

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13 pages; OS: Windows XP

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Anders, Andre June 16, 2004.

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The condensation of energetic metal ions on a surface may cause self-sputtering even in the absence of substrate bias. Charge-state-averaged self-sputtering yields were determined for both zirconium and gold ions generated by a cathodic vacuum arc. Films were deposited on differently biased substrates exposed to streaming Zr and Au vacuum arc plasma. The self-sputtering yields for both metals were estimated to be about 0.05 in the absence of bias, and exceeding 0.5 when bias reached-50 V. These surprisingly high values can be reconciled with binary collision theory and molecular dynamics calculations taking high the kinetic and potential energy of vacuum arc ions into account.

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13 pages; OS: Windows XP

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INIS; OSTI as DE00838671

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  • Journal Name: Applied Physics Letters; Journal Volume: 85; Other Information: Submitted to Applied Physics Letters: Volume 85; Journal Publication Date: 2004

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  • Report No.: LBNL--55876
  • Grant Number: AC03-76SF00098
  • DOI: 10.1063/1.1840115 | External Link
  • Office of Scientific & Technical Information Report Number: 838671
  • Archival Resource Key: ark:/67531/metadc782302

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Office of Scientific & Technical Information Technical Reports

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  • June 16, 2004

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  • Dec. 3, 2015, 9:30 a.m.

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  • April 4, 2016, 6:23 p.m.

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Anders, Andre. Observation of self-sputtering in energetic condensation of metal ions, article, June 16, 2004; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc782302/: accessed September 20, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.