Boltzmann-equation simulations of radio-frequency-driven, low-temperature plasmas

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Description

We present a method for the numerical solution of the Boltzmann equation (BE) describing plasma electrons. We apply the method to a capacitively-coupled, radio-frequency-driven He discharge in parallel-plate (quasi-1D) geometry which contains time scales for physical processes spanning six orders of magnitude. Our BE solution procedure uses the method of characteristics for the Vlasov operator with interpolation in phase space at early time, allowing storage of the distribution function on a fixed phase-space grid. By alternating this BE method with a fluid description of the electrons, or with a novel time-cycle-average equation method, we compute the periodic steady state of ... continued below

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27 p.

Creation Information

Drallos, P.J. & Riley, M.E. January 1, 1995.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We present a method for the numerical solution of the Boltzmann equation (BE) describing plasma electrons. We apply the method to a capacitively-coupled, radio-frequency-driven He discharge in parallel-plate (quasi-1D) geometry which contains time scales for physical processes spanning six orders of magnitude. Our BE solution procedure uses the method of characteristics for the Vlasov operator with interpolation in phase space at early time, allowing storage of the distribution function on a fixed phase-space grid. By alternating this BE method with a fluid description of the electrons, or with a novel time-cycle-average equation method, we compute the periodic steady state of a He plasma by time evolution from startup conditions. We find that the results compare favorably with measured current-voltage, plasma density, and ``cited state densities in the ``GEC`` Reference Cell. Our atomic He model includes five levels (some are summed composites), 15 electronic transitions, radiation trapping, and metastable-metastable collisions.

Physical Description

27 p.

Notes

INIS; OSTI as DE95007716

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  • Other Information: PBD: Jan 1995

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  • Other: DE95007716
  • Report No.: SAND--93-0499
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/83882 | External Link
  • Office of Scientific & Technical Information Report Number: 83882
  • Archival Resource Key: ark:/67531/metadc781870

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  • January 1, 1995

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  • Dec. 3, 2015, 9:30 a.m.

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  • April 13, 2016, 1 p.m.

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Drallos, P.J. & Riley, M.E. Boltzmann-equation simulations of radio-frequency-driven, low-temperature plasmas, report, January 1, 1995; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc781870/: accessed September 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.