High resolution transmission electron microscopy study of diamond films grown from fullerene precursors

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High-resolution transmission electron microscopy (HRTEM) has been used to investigate the microstructure of diamond films grown by plasma-assisted chemical vapor deposition using fullerene precursors. HRTEM observations of as-grown films revealed an array of larger crystals (>200 nm) within a polycrystalline matrix of much smaller crystallites (<20 nm). The randomly oriented small crystallites were nearly free of structural imperfections such as stacking faults or twins, while the larger ones had preferred <110> orientations with respect to the Si (100) substrate and showed evidence of structural defects on the periphery of the crystals. The most common defects were V-shaped {Sigma}9 twin boundaries, ... continued below

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15 p.

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Luo, J. S.; Gruen, D. M. & Krauss, A. R. July 1995.

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High-resolution transmission electron microscopy (HRTEM) has been used to investigate the microstructure of diamond films grown by plasma-assisted chemical vapor deposition using fullerene precursors. HRTEM observations of as-grown films revealed an array of larger crystals (>200 nm) within a polycrystalline matrix of much smaller crystallites (<20 nm). The randomly oriented small crystallites were nearly free of structural imperfections such as stacking faults or twins, while the larger ones had preferred <110> orientations with respect to the Si (100) substrate and showed evidence of structural defects on the periphery of the crystals. The most common defects were V-shaped {Sigma}9 twin boundaries, which are generally believed to serve as re-entrant sites for diamond nucleation and growth. The observation of growth steps on both (111) and (110) surfaces seems to support a reaction model in which fragments of C{sub 60}, including C{sub 2}, are considered the growth species. In particular, the nanocrystallinity of the films is most likely due to a high carbon cluster density from C{sub 60} fragmentation at or near the diamond surface, which can serve as nucleation sites for the growth of new crystallites.

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15 p.

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OSTI as DE95013772

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  • 187. meeting of the Electrochemical Society, Reno, NV (United States), 21-26 May 1995

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  • Other: DE95013772
  • Report No.: ANL/CHM/CP--86590
  • Report No.: CONF-950518--12
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 82408
  • Archival Resource Key: ark:/67531/metadc781190

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  • July 1995

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  • Dec. 3, 2015, 9:30 a.m.

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  • Dec. 11, 2015, 5:06 p.m.

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Luo, J. S.; Gruen, D. M. & Krauss, A. R. High resolution transmission electron microscopy study of diamond films grown from fullerene precursors, article, July 1995; Illinois. (digital.library.unt.edu/ark:/67531/metadc781190/: accessed June 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.