High resolution XPS study of oxide layers grown on Ge substrates

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High resolution X-ray Photoelectron Spectroscopy (XPS) was used to analyze thin layers of germanium oxide grown on germanium substrates under various conditions. The results reveal the presence of high density of electron states located at the oxide/germanium interface that lead to the energy band bending. The surface of native oxide layers and that of thin oxide layer grown under dry oxygen correspond to GeO2 composition. Under Ar etching, lower oxidation states were revealed. Short in-situ heat treatment at T=400 degrees C under ultra high vacuum leads to the removal of the oxide layer. In addition, the analysis of the layer ... continued below

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Tabet, N.; Faiz, M.; Hamdan, N.M. & Hussain, Z. July 29, 2002.

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High resolution X-ray Photoelectron Spectroscopy (XPS) was used to analyze thin layers of germanium oxide grown on germanium substrates under various conditions. The results reveal the presence of high density of electron states located at the oxide/germanium interface that lead to the energy band bending. The surface of native oxide layers and that of thin oxide layer grown under dry oxygen correspond to GeO2 composition. Under Ar etching, lower oxidation states were revealed. Short in-situ heat treatment at T=400 degrees C under ultra high vacuum leads to the removal of the oxide layer. In addition, the analysis of the layer grown at T=380 degrees C under dry oxygen suggest that carbides form at the oxide/substrate interface.

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  • Journal Name: Surface Science; Journal Volume: 523; Journal Issue: 1-2; Other Information: Journal Publication Date: 01/10/2003

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  • Report No.: LBNL--51198
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 825455
  • Archival Resource Key: ark:/67531/metadc781036

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • July 29, 2002

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  • Dec. 3, 2015, 9:30 a.m.

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  • June 15, 2016, 1:07 p.m.

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Tabet, N.; Faiz, M.; Hamdan, N.M. & Hussain, Z. High resolution XPS study of oxide layers grown on Ge substrates, article, July 29, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc781036/: accessed September 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.