Atomic scale heating in energetic plasma deposition

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Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on ... continued below

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10 pages

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Anders, Andre September 28, 2001.

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Description

Energetic deposition using filtered cathodic arc plasma is known to lead to well adherent and dense films. Interface mixing, subplantation depth, texture, and stress of the growing film are often studied as a function of the kinetic energy of condensing ions. Ions have also potential energy contributing to atomic scale heating, secondary electron emission and potential sputtering, thereby affecting all film properties. A table is presented showing kinetic and potential energies of ions in cathodic arc plasmas. These energies are greater than the binding energy, surface binding energy, and activation energy of surface diffusion. The role of potential energy on film growth is not limited to the cathodic arc plasma deposition process.

Physical Description

10 pages

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INIS; OSTI as DE00836651

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  • Journal Name: Applied Physics Letters; Journal Volume: 80; Journal Issue: 6; Other Information: Submitted to Applied Physics Letters: Volume 80, No.6; Journal Publication Date: 02/11/2002

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  • Report No.: LBNL--48989
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 836651
  • Archival Resource Key: ark:/67531/metadc780880

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  • September 28, 2001

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  • Dec. 3, 2015, 9:30 a.m.

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  • Sept. 25, 2017, 4:07 p.m.

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Anders, Andre. Atomic scale heating in energetic plasma deposition, article, September 28, 2001; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc780880/: accessed November 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.