Synthesis and characterization of a metastable (SiC){sub 3}N{sub 4} phase

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A metastable C-SI-N compound has been synthesized by high dose N{sup +} implantation into polycrystalline {beta}-SiC (cubic phase). The thin films formed upon 100 keV implantation were characterized with respect to various ion doses and target temperatures. X-ray diffraction with a position-sensitive detector and cross-sectional transmission electron microscopy revealed that the as-implanted surfaces contained {approximately} 0.15 {mu}m thick continuously-buried amorphous layers. Rutherford backscattering spectroscopy showed that the peak concentration of nitrogen saturated up to approximately 54 at. % with increasing doses, suggesting a new phase formation.

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6 p.

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Uslu, C.; Park, B. & Poker, D.B. December 31, 1994.

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  • Uslu, C.
  • Park, B. Georgia Inst. of Tech., Atlanta, GA (United States). School of Materials Science and Engineering
  • Poker, D.B. Oak Ridge National Lab., TN (United States)

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Description

A metastable C-SI-N compound has been synthesized by high dose N{sup +} implantation into polycrystalline {beta}-SiC (cubic phase). The thin films formed upon 100 keV implantation were characterized with respect to various ion doses and target temperatures. X-ray diffraction with a position-sensitive detector and cross-sectional transmission electron microscopy revealed that the as-implanted surfaces contained {approximately} 0.15 {mu}m thick continuously-buried amorphous layers. Rutherford backscattering spectroscopy showed that the peak concentration of nitrogen saturated up to approximately 54 at. % with increasing doses, suggesting a new phase formation.

Physical Description

6 p.

Notes

OSTI as DE95008972

Source

  • Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994

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  • Other: DE95008972
  • Report No.: CONF-941144--155
  • Grant Number: AC05-84OR21400
  • Office of Scientific & Technical Information Report Number: 83108
  • Archival Resource Key: ark:/67531/metadc779790

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • December 31, 1994

Added to The UNT Digital Library

  • Dec. 3, 2015, 9:30 a.m.

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  • June 24, 2016, 10:01 p.m.

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Uslu, C.; Park, B. & Poker, D.B. Synthesis and characterization of a metastable (SiC){sub 3}N{sub 4} phase, article, December 31, 1994; Tennessee. (digital.library.unt.edu/ark:/67531/metadc779790/: accessed November 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.