Infrared Frequency Selective Surfaces Fabricated using Optical Lithography and Phase-Shift Masks Page: 3 of 18
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such as masked electron beam lithography, ion beam lithography6, and nanoimprint lithography5
have been employed. In this work, the fabrication of an infrared FSS was achieved using optical
lithography. Compared to the other fabrication methods, optical lithography offers the advantage
of being an established manufacturing technique which can achieve high throughput, good
uniformity, and repeatability.
The FSS described here is a demonstration of a type of a wavelength selective filter which can be
used to increase the efficiency of a thermophotovoltaic (TPV) system. In such a system,
electricity is produced by converting infrared radiation from a heat source into electricity using a
compound semiconductor thermophotovoltaic cell. Such a cell can only convert light with a
wavelength shorter than the bandgap (2 ) of the cell. The bandgap wavelength of the TPV
system considered in this paper is -2.5 m. To improve the efficiency of the system, a FSS is
placed between the heat source and the TPV cell. The FSS reflects light with a wavelength
longer than the bandgap back to the heat source rather than wasting this energy. Because the TPV
cell is most efficient for wavelengths just shorter than the bandgap wavelength, it is desirable to
have such light transmitted by the FSS with a minimum amount of absorption and reflection.
Because the light from the heat source may strike the FSS at various angles, the FSS
performance also needs to be independent of the angle of incidence.
L. Fabrication
The design for the FSS contains a hexagonal array of circular slits or rings spaced by 1100 nm
center to center. The diameter and the linewidths of the circular slits are nominally 900 and 100Az
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Spector, S.J.; Astolfi, D.K.; Doran, S.P.; Lyszczarz, T.M. & Raynolds, J.E. Infrared Frequency Selective Surfaces Fabricated using Optical Lithography and Phase-Shift Masks, report, June 15, 2001; Schenectady, New York. (https://digital.library.unt.edu/ark:/67531/metadc779378/m1/3/: accessed April 19, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.