Elimination of 'ghost'-effect-related systematic error in metrology of X-ray optics with a long trace profiler

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A data acquisition technique and relevant program for suppression of one of the systematic effects, namely the ''ghost'' effect, of a second generation long trace profiler (LTP) is described. The ''ghost'' effect arises when there is an unavoidable cross-contamination of the LTP sample and reference signals into one another, leading to a systematic perturbation in the recorded interference patterns and, therefore, a systematic variation of the measured slope trace. Perturbations of about 1-2 {micro}rad have been observed with a cylindrically shaped X-ray mirror. Even stronger ''ghost'' effects show up in an LTP measurement with a mirror having a toroidal surface ... continued below

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8 pages

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Yashchuk, Valeriy V.; Irick, Steve C. & MacDowell, Alastair A. April 28, 2005.

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Description

A data acquisition technique and relevant program for suppression of one of the systematic effects, namely the ''ghost'' effect, of a second generation long trace profiler (LTP) is described. The ''ghost'' effect arises when there is an unavoidable cross-contamination of the LTP sample and reference signals into one another, leading to a systematic perturbation in the recorded interference patterns and, therefore, a systematic variation of the measured slope trace. Perturbations of about 1-2 {micro}rad have been observed with a cylindrically shaped X-ray mirror. Even stronger ''ghost'' effects show up in an LTP measurement with a mirror having a toroidal surface figure. The developed technique employs separate measurement of the ''ghost''-effect-related interference patterns in the sample and the reference arms and then subtraction of the ''ghost'' patterns from the sample and the reference interference patterns. The procedure preserves the advantage of simultaneously measuring the sample and reference signals. The effectiveness of the technique is illustrated with LTP metrology of a variety of X-ray mirrors.

Physical Description

8 pages

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OSTI as DE00842047

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  • SPIE Symposium on Optical Metrology 2005, part of LASER2005, World of Photonics, Munich (DE), 06/12/2005--06/17/2005

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  • Report No.: LBNL--57519
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 842047
  • Archival Resource Key: ark:/67531/metadc779311

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • April 28, 2005

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  • Dec. 3, 2015, 9:30 a.m.

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  • Sept. 21, 2017, 6 p.m.

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Yashchuk, Valeriy V.; Irick, Steve C. & MacDowell, Alastair A. Elimination of 'ghost'-effect-related systematic error in metrology of X-ray optics with a long trace profiler, article, April 28, 2005; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc779311/: accessed December 16, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.